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US 10,379,074 B2Granted
System and method for shielded chemical sensing using a fine-line shielded sensing structure
AssigneeNeoTek Energy, Inc.
InventorsDirk De Bruyker, Richard C. Eden, Daniel O'Brien
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Abstract
A sensor apparatus includes a substrate, a plurality of parallel interdigitated sensor electrode fingers disposed over the substrate, a peripheral shield disposed over at least some of a periphery of the substrate, and a sensing material disposed in gaps formed by surfaces of the sensor electrode fingers and the peripheral shield. In some embodiments, an area shield is also disposed over the electrode fingers.
Claims20
A sensor apparatus comprising:
- a substrate;
- a plurality of parallel interdigitated sensor electrode fingers disposed over the substrate;
- a peripheral shield disposed over at least some of a periphery of the substrate;
- and
- a sensing material disposed in gaps formed by surfaces of the sensor electrode fingers and the peripheral shield.
2 more elements
A method for fabricating a sensing structure comprising:
- providing a substrate;
- forming a plurality of parallel interdigitated sensor electrode fingers over the substrate;
- forming a peripheral shield over at least some of a periphery of the substrate;
- and
- providing a sensing material in gaps formed by surfaces of the sensor electrode fingers and the peripheral shield.
2 more elements
Dependencies are inferred from the claim text.