X-ray transmission inspection apparatus
AssigneeHitachi High-Tech Science Corporation
InventorToshiyuki Takahara
Life of this patent
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Abstract
An X-ray transmission inspection apparatus capable of easily performing the adjustment by a standard sample is provided. The apparatus is provided with an X-ray source; an X-ray detector; a standard sample moving mechanism configured to move a standard sample placed in a different position from that of a sample; and an arrangement changing mechanism configured to be in a such a manner that the X-ray source and the X-ray detector, and the sample and the standard sample are movable relative to each other, and configured to change an arrangement state from one arrangement state in which the X-ray source and the X-ray detector face the sample to the other arrangement state in which the X-ray source and the X-ray detector face the standard sample that is moved by the standard sample moving mechanism.
Claims6
An X-ray transmission inspection apparatus, comprising:
- an X-ray source that irradiates X-rays to a sample;
- a sample moving mechanism that moves the sample continuously in a predetermined direction while X-rays are irradiated from the X-ray source;
- an X-ray detector that is provided opposed to the X-ray source with respect to the sample and detects the X-rays transmitted through the sample;
- a standard sample moving mechanism configured to move a standard sample placed in a different position from that of the sample;
- and
- an arrangement changing mechanism configured to be in a such a manner that the X-ray source and the X-ray detector, and the sample and the standard sample are movable relative to each other, and configured to change an arrangement state from one arrangement state in which the X-ray source and the X-ray detector face the sample to the other arrangement state in which the X-ray source and the X-ray detector face the standard sample that is moved by the standard sample moving mechanism.
Dependencies are inferred from the claim text.