Wavefront testing system
AssigneeTonta Electro Optical Co., Ltd.
InventorsChao-Wen Liang, Chin-Chang Liang
Life of this patent
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Abstract
An optical wavefront testing system includes a light source, an image capturing unit and a processing unit. The image capturing unit includes a lens array and a sensor module that is configured to detect light rays passing through an optical element and the lens array. The processing unit controls the sensor module to detect the light rays under a plurality exposure conditions for generating a plurality of images each including a plurality of light spots, obtains a plurality of light spot datasets corresponding to the light spots and each including a plurality of pixel coordinate sets and a plurality of pixel values, and obtains wavefront information associated with the light spots based on the light spot datasets of at least two of the images.
Claims20
A wavefront testing system for use with a to-be-tested optical element, comprising:
- a light source for generating a light beam that is transmitted toward the to-be-tested optical element;
- a to-be-tested optical element for generating aberrations that determine a uniformity of the light beam passing therethrough;
- an image capturing unit including a lens array through which the light beam passes to become a plurality of light spots, and a sensor module for detecting the light spots;
- and
- a processing unit coupled to said light source and said image capturing unit, and controlling said light source and said image capturing unit to operate in a plurality of different exposure conditions each associated with a distinct amount of exposure of images acquired by said sensor module;
- wherein said processing unit executes the following operations of
- controlling said sensor module to acquire the light spots under each of the exposure conditions, so a plurality of images each including a plurality of light spots are acquired,
- obtaining, for each of the images, a plurality of light spot datasets from said sensor module, each of the light spot datasets corresponding to a respective one of the light spots and including a plurality of pixel coordinate sets that indicate locations of pixels covered by the respective one of the light spots and a plurality of pixel values corresponding respectively with the pixel coordinate sets, and
- obtaining wavefront information associated with the light spots based on the light spot datasets of at least two of the images.
Dependencies are inferred from the claim text.