Method for producing a sensor element by means of laser structuring

A method for producing a sensor element (10) for a pressure or force sensor, comprising:

• a) providing a component (13) to be deformed;
• b) applying to the component (13) a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10;
• and
• c) planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing,
• wherein for ablating the material, laser pulses selected from a group consisting of laser pulses in the sub-picosecond range, laser pulses from a broadband laser source (28) with a wavelength bandwidth of 10 nm to 70 nm, laser pulses from a broadband laser source (28) with a fundamental wavelength and a wavelength bandwidth that is greater than or equal to 1% of the fundamental wavelength, laser pulses compressed by a pulse compression process, and laser pulses conducted through a hollow-core fiber are used.