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US 10,378,104 B2Granted
Process for producing carbon nanotubes and method for forming wiring
AssigneeTokyo Electron Limited
InventorsDaisuke Nishide, Takashi Matsumoto, Munehito Kagaya
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Abstract
A carbon nanotube producing method, which is capable of realizing a low resistant depth-wise wiring. An acetylene gas is first supplied as a carbon-containing gas and subsequently, an ethylene gas is supplied as the carbon-containing gas such that carbon nanotubes are produced.
Claims13
A method of producing a carbon nanotube by supplying a carbon-containing gas onto a substrate, comprising:
- supplying a first carbon-containing gas at an initial stage of carbon nanotube production for a predetermined period of time;
- after the lapse of the predetermined period of time, terminating the supply of the first carbon-containing gas;
- and
- immediately after the termination of the supply of the first carbon-containing gas, subsequently supplying a second carbon-containing gas at a termination stage of carbon nanotube production,
- wherein in the initial stage of carbon nanotube production, the first carbon-containing gas supplied onto the substrate contains only an acetylene gas,
- wherein in the termination stage of carbon nanotube production, the second carbon-containing gas supplied onto the substrate contains only an ethylene gas, and
- wherein a temperature of the substrate is set to be equal to or higher than 425 degrees C. and lower than 525 degrees C.
4 more elements
A method of forming a depth-wise wiring in a three-dimensional packaging device formed on a substrate, comprising:
- supplying a first carbon-containing gas and a second carbon-containing gas onto the substrate,
- wherein the act of supplying the first carbon-containing gas and the second carbon-containing gas includes:
- supplying the first carbon-containing gas at an initial stage of carbon nanotube production for a predetermined period of time;
- after the lapse of the predetermined period of time, terminating the supply of the first carbon-containing gas;
- and
- immediately after the termination of the supply of the first carbon-containing gas, subsequently supplying the second carbon-containing gas at a termination stage of carbon nanotube production, and
- wherein in the initial stage of carbon nanotube production, the first carbon-containing gas supplied onto the substrate contains only an acetylene gas,
- wherein in the termination stage of carbon nanotube production, the second carbon-containing gas supplied onto the substrate contains only an ethylene gas, and
- wherein a temperature of the substrate is set to be equal to or higher than 425 degrees C. and lower than 525 degrees C.
6 more elements
Dependencies are inferred from the claim text.