Rotary cathode unit for magnetron sputtering apparatus
AssigneeUlvac, Inc.
InventorShuuji Saitou
Life of this patent
Estimating the term…
Abstract
A magnet unit Mu is disposed inside a target of a cylindrical shape and generates a magnetic field that leaks from a surface of the target such that a line passing through a position in which a vertical component of the magnetic field becomes zero extends along a generating line of the target so as to close like a racetrack shape. The magnet unit is constituted into separate parts of: a first part which respectively forms a corner portion of the racetrack shape at both ends, in the direction of the generating line, of the target; a second part which is respectively disposed on the inside, as seen in the direction of the generating line, of the target, adjacent to the first part; and a third part which is positioned between the second parts.
Claims7
A rotary cathode unit for a magnetron sputtering apparatus comprising:
- a cylindrical target;
- a magnet unit disposed in an inner space of the target, the magnet unit generating a magnetic field that leaks from a target surface such that a line passing through a position in which a vertical component of the magnetic field becomes zero extends along a generating line of the target so as to close like a racetrack shape;
- coolant circulation means for circulating a coolant through the inner space of the target;
- and driving means for driving the target to rotate,
- wherein the magnet unit includes
- a pair of first magnets, a pair of second magnets, and a single third magnet which are arranged in a direction of the generating line,
- the pair of first magnets which respectively forms a corner portion of the racetrack shape and each first part being located respectively at both ends, as seen in the direction of the generating line, of the target;
- the pair of second magnets which is respectively disposed on the inside, as seen in the direction of the generating line, of the target, immediately adjacent to the pair of first parts;
- and
- the single third magnet which is positioned centrally and immediately adjacent to (and between) each second magnet;
- and,
- wherein each of the pair of first magnets, each of the pair of second magnets, and the single third magnet
- has a yoke underneath respectively, each yoke having a same sectional shape, and
- is divided in a direction perpendicular to the direction of the generating line into central magnets on a top surface of each yoke;
- and
- peripheral magnets which are substantially equal in length to the central magnets provided in parallel to the central magnets
- wherein the magnet unit includes a first moving means for moving the pair of the first magnet and the pair of the second magnet independent of each other toward and away from the surface of the target, the first moving means being housed in the inner space of the target.
Dependencies are inferred from the claim text.