Film forming apparatus
AssigneeToyota Jidosha Kabushiki Kaisha
InventorsShota Matsuda, Hiromichi Nakata, Takayasu Sato, Yoji Sato, Kazutaka Tachibana, Daiki Tsuboi
Life of this patent
Estimating the term…
Loading patent…
AssigneeToyota Jidosha Kabushiki Kaisha
InventorsShota Matsuda, Hiromichi Nakata, Takayasu Sato, Yoji Sato, Kazutaka Tachibana, Daiki Tsuboi
Estimating the term…
A film forming apparatus includes a cylindrical evaporation source, an electrode, and a gas passage. The evaporation source is composed of metal and includes an internal space for accommodating a workplace. The electrode is arranged in the internal space of the evaporation source, The gas passage supplies gas to the internal space of the evaporation source from a space outside the evaporation source. The gas passage includes an end portion located in the internal space. The end portion of the gas passage includes a first section composed of a first material and a second section composed of a second material. The first material and the second material have different thermal expansion coefficients.
A film forming apparatus comprising:
Dependencies are inferred from the claim text.