Surface protective film, making method, and substrate processing laminate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsYoichiro Ichioka, Kazunori Kondo
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Abstract
A surface protective film comprising a base film and a resin film thereon can be bonded to a substrate having a circuit-forming surface and separated therefrom after processing. The resin film is formed of a resin composition comprising (A) a silphenylene-siloxane skeleton-containing resin, (B) a compound capable of reacting with an epoxy group in the resin to form a crosslinked structure, (C) a curing catalyst, and (D) a parting agent.
Claims10
A surface protective film comprising a base film and a resin film formed thereon, said resin film being formed of a resin composition comprising components (A) to (D):
- (A) a silphenylene-siloxane skeleton-containing resin represented by the formula (1) and having a weight average molecular weight of 10,000 to 100,000,
- (B) a compound capable of reacting with an epoxy group in the silphenylene-siloxane skeleton-containing resin to form a crosslinked structure,
- (C) a curing catalyst, and
- (D) a parting agent selected from the group consisting of polyethylenes, silicone compounds, fluorine compounds, fatty acids, and fatty acid esters, in an amount of 0.5 to 20 parts by weight per 100 parts by weight of component (A),
- wherein R1 to R6 are each independently a C1-C20 monovalent hydrocarbon group or alkoxy group,
- a, b, c, and d, indicative of compositional ratios of corresponding repeating units, are positive numbers satisfying:
- 0<a<1, 0<b<1, 0<c<1, 0<d<1, 0.35≤a+c≤0.65, 0.35≤b+d≤0.65, and a+b+c+d=1, g is an integer of 0 to 300,
- X is a divalent organic group having the formula (2):
- wherein E is a divalent organic group selected from the following:
- s is 0 or 1, R7 and R8 are each independently a C1-C20 monovalent hydrocarbon group or alkoxy group, t and u are each independently an integer of 0 to 2, and
- Y is a divalent siloxane chain having the formula (3):
- wherein R9 to R14 are each independently a C1-C20 monovalent hydrocarbon group or alkoxy group, and j is an integer of 0 to 300.
A method for preparing a surface protective film comprising a base film and a resin film formed thereon, the method comprising the steps of applying a surface protective resin composition onto the base film and heat curing the composition into the resin film, said resin composition comprising components (A) to (D):
- (A) a silphenylene-siloxane skeleton-containing resin represented by the formula (1) and having a weight average molecular weight of 10,000 to 100,000,
- (B) a compound capable of reacting with an epoxy group in the silphenylene-siloxane skeleton-containing resin to form a crosslinked structure,
- (C) a curing catalyst, and
- (D) a parting agent selected from the group consisting of polyethylenes, silicone compounds, fluorine compounds, fatty acids, and fatty acid esters, in an amount of 0.5 to 20 parts by weight per 100 parts by weight of component (A),
- wherein R1 to R6 are each independently a C1-C20 monovalent hydrocarbon group or alkoxy group,
- a, b, c, and d, indicative of compositional ratios of corresponding repeating units, are positive numbers satisfying:
- 0<a<1, 0<b<1, 0<c<1, 0<d<1, 0.35≤a+c≤0.65, 0.35≤b+d≤0.65, and a+b+c+d=1, g is an integer of 0 to 300,
- X is a divalent organic group having the formula (2):
- wherein E is a divalent organic group selected from the following:
- s is 0 or 1, R7 and R8 are each independently a C1-C20 monovalent hydrocarbon group or alkoxy group, t and u are each independently an integer of 0 to 2, and
- Y is a divalent siloxane chain having the formula (3):
- wherein R9 to R14 are each independently a C1-C20 monovalent hydrocarbon group or alkoxy group, and j is an integer of 0 to 300.
Dependencies are inferred from the claim text.