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US 10,377,881 B2Granted
Composition and molded article
AssigneesAkita University, Daikin Industries, Ltd.
InventorsKazuya Matsumoto, Mitsutoshi Jikei, Kunio Nishi, Tsuyoshi Noguchi, Fumihiro Kamiya
Life of this patent
Estimating the term…
Abstract
The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against both fluorine plasma exposure and oxygen plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a cage silsesquioxane having a specific structure.
Claims12
A composition comprising a fluorine-containing polymer and a cage silsesquioxane represented by the following formula (1):
- wherein R1 to R8 are each individually a hydrogen atom, a halogen atom, or an organic group,
- wherein the cage silsesquioxane is in the form of a cage silsesquioxane dendrimer.
Dependencies are inferred from the claim text.