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US 10,377,848 B2Granted
Aromatic resins for underlayers
AssigneesRohm and Haas Electronic Materials LLC, Rohm and Haas Electronic Materials Korea Ltd.
InventorsSeon-Hwa Han, Sung Wook Cho, Hae-Kwang Pyun, Jung-June Lee, Shintaro Yamada
Life of this patent
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Abstract
Polymeric reaction products of certain aromatic alcohols with certain diaryl-substituted aliphatic alcohols are useful as underlayers in semiconductor manufacturing processes.
Claims11
A polymeric reaction product of one or more first monomers of the formula (1)
- wherein Ar1 and Ar2 independently represent an aromatic moiety having from 2 to 7 fused aromatic rings;
- R1 and R2 are independently selected from (C1-C20)alkyl, (C2-C20)alkenyl, (C2-C20)alkynyl, (C6-C30)aryl, (C7-C30)aralkyl and (C7-C30)alkaryl;
- X1 is selected from OH, SH and OR3;
- R3 is (C1-C20)alkyl;
- and each of n1 and n2 is an integer independently selected from 0 to 5;
- wherein R1 and R2 may be taken together to form a 5- to 7-membered fused ring;
- one or more second monomers of the formula (2)
- wherein Ar3 and Ar4 independently represent an aromatic;
- R4 is selected from hydroxy, (C1-C20)alkyl, (C1-C20)alkoxy, (C2-C20)alkenyl, (C2-C20)alkynyl, mercapto, (C1-C20)alkylthio, (C6-C30)aryl, (C7-C30)aralkyl and (C7-C30)alkaryl;
- R5 is selected from (C1-C20)alkyl, (C2-C20)alkenyl, (C2-C20)alkynyl, (C6-C30)aryl, (C7-C30)aralkyl and (C7-C30)alkaryl;
- X2 is selected from OH, SH and OR6;
- R6 is (C1-C20)alkyl;
- n3 is an integer from 0 to 4;
- and n4 is an integer from 0 to 5;
- wherein R4 and R5 may be taken together to form a 5- to 7-membered fused ring;
- and optionally one or more third monomers of formula (3)
- wherein R7 is selected from hydroxy, (C1-C20)alkyl, (C1-C20)alkoxy, (C2-C20)alkenyl, (C2-C20)alkynyl, mercapto, (C1-C20)alkylthio, (C6-C30)aryl, (C7-C30)aralkyl and (C7-C30)alkaryl;
- R8 is selected from (C1-C20)alkyl, (C2-C20)alkenyl, (C2-C20)alkynyl, and (C7-C30)aralkyl;
- X3 is selected from OH, SH and OR9;
- R9 is (C1-C20)alkyl;
- and Ar5 is an aromatic moiety.
18 more elements
Dependencies are inferred from the claim text.