Resist composition, method for forming resist pattern, polyphenol derivative for use in the composition

A polyphenol derivative represented by the following formula (3) or (4):

• wherein X′ is a hydrogen atom or a monovalent substituent of 1 to 18 carbon atoms;
• each R0 is independently an alkyl group of 1 to 4 carbon atoms or a halogen atom and may be the same as or different from each other on the same naphthalene ring or benzene ring;
• each R4 is independently a hydrogen atom or an acid dissociation group;
• at least one of R4 is an acid dissociation group;
• each p is independently an integer of 0 to 5;
• and q is 1;
• wherein each acid dissociation group is independently selected from the group consisting of a substituted methyl group, a 1-substituted ethyl group, a 1-substituted n-propyl group, a 1-branched alkyl group having 5 to 18 carbon atoms, an isopropyl group, a silyl group, an acyl group, a 1-substituted alkoxymethyl group, an alkoxycarbonyl group, and an alkoxycarbonylalkyl group
• wherein the substituted methyl group includes at least one group selected from a methoxymethyl group, a methylthiomethyl group, an ethoxymethyl group, a n-propoxymethyl group, an isopropoxymethyl group, a n-butoxymethyl group, a 2-methylpropoxymethyl group, an ethylthiomethyl group, a methoxyethoxymethyl group, a phenyloxymethyl group, a 1-cyclopentyloxymethyl group, a 1-cyclohexyloxymethyl group, a benzylthiomethyl group, a phenacyl group, a 4-bromophenacyl group, a 4-methoxyphenacyl group, a piperonyl group, and a substituent represented by the following formulae (13-1),
• wherein R″ is an alkyl group of 1 to 4 carbon atoms.

A polyphenol derivative comprising:

• a compound represented by the following formula (1) or (2):
• wherein R1 is a single bond or a 2n-valent hydrocarbon group of 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group (except for an aromatic group), a double bond, a heteroatom, or an aromatic group of 6 to 30 carbon atoms;
• each R2 is independently a hydrogen atom, a halogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, an alkenyl group of 2 to 10 carbon atoms, a hydroxyl group, or a group in which a hydrogen atom of a hydroxyl group is substituted with an acid dissociation group, and may be the same as or different from each other on the same naphthalene ring or benzene ring;
• at least one of R2 is a group in which a hydrogen atom of a hydroxyl group is substituted with an acid dissociation group;
• n is an integer of 1 to 4;
• structural formulas of repeating units in the formulas (1) and (2) may be the same as or different from each other;
• in the formula (1), each m1 is independently an integer of 1 to 7;
• and in the formula (2), each X is independently an oxygen atom or a sulfur atom, each m2 is independently an integer of 1 to 6, and each q is 1;
• wherein each acid dissociation group is independently selected from the group consisting of a substituted methyl group, a 1-substituted ethyl group, a 1-substituted n-propyl group, a 1-branched alkyl group having 5 to 18 carbon atoms, an isopropyl group, a silyl group, an acyl group, a 1-substituted alkoxymethyl group, an alkoxycarbonyl group, and an alkoxycarbonylalkyl group
• wherein the substituted methyl group includes at least one group selected from a methoxymethyl group, a methylthiomethyl group, an ethoxymethyl group, a n-propoxymethyl group, an isopropoxymethyl group, a n-butoxymethyl group, a 2-methylpropoxymethyl group, an ethylthiomethyl group, a methoxyethoxymethyl group, a phenyloxymethyl group, a 1-cyclopentyloxymethyl group, a 1-cyclohexyloxymethyl group, a benzylthiomethyl group, a phenacyl group, a 4-bromophenacyl group, a 4-methoxyphenacyl group, a piperonyl group, and a substituent represented by the following formulae (13-1),
• wherein R″ is an alkyl group of 1 to 4 carbon atoms.

A polyphenol derivative comprising:

• a compound represented by the following formula (1-1) or (2-1):
• wherein R1 is a single bond or a 2n-valent hydrocarbon group of 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group (except for an aromatic group), a double bond, a heteroatom, or an aromatic group of 6 to 30 carbon atoms;
• each R3 is independently a hydrogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, or an alkenyl group of 2 to 10 carbon atoms and may be the same as or different from each other on the same naphthalene ring or benzene ring;
• each R4 is independently a hydrogen atom or an acid dissociation group;
• at least one of R4 is an acid dissociation group;
• structural formulas of repeating units in the formulas (1-1) and (2-1) may be the same as or different from each other;
• n is an integer of 1 to 4;
• in the formula (1-1), each m3 is independently an integer of 1 to 7, each m4 is independently an integer of 0 to 6, and each m3+m4 is independently an integer of 1 to 7;
• and in the formula (2-1), each m5 is independently an integer of 1 to 6, each m6 is independently an integer of 0 to 5, each m5+m6 is independently an integer of 1 to 6, and each q is 1;
• wherein each acid dissociation group is independently selected from the group consisting of a substituted methyl group, a 1-substituted ethyl group, a 1-substituted n-propyl group, a 1-branched alkyl group having 5 to 18 carbon atoms, an isopropyl group, a silyl group, an acyl group, a 1-substituted alkoxymethyl group, an alkoxycarbonyl group, and an alkoxycarbonylalkyl group
• wherein the substituted methyl group includes at least one group selected from a methoxymethyl group, a methylthiomethyl group, an ethoxymethyl group, a n-propoxymethyl group, an isopropoxymethyl group, a n-butoxymethyl group, a 2-methylpropoxymethyl group, an ethylthiomethyl group, a methoxyethoxymethyl group, a phenyloxymethyl group, a 1-cyclopentyloxymethyl group, a 1-cyclohexyloxymethyl group, a benzylthiomethyl group, a phenacyl group, a 4-bromophenacyl group, a 4-methoxyphenacyl group, a piperonyl group, and a substituent represented by the following formulae (13-1),
• wherein R″ is an alkyl group of 1 to 4 carbon atoms.

A polyphenol derivative comprising:

• a compound represented by the following formula (1-2) or (2-2):
• wherein R1 is a single bond or a 2n-valent hydrocarbon group of 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group (except for an aromatic group), a double bond, a heteroatom, or an aromatic group of 6 to 30 carbon atoms;
• each R3 is independently a hydrogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, or an alkenyl group of 2 to 10 carbon atoms and may be the same as or different from each other on the same naphthalene ring or benzene ring;
• each R4 is independently a hydrogen atom or an acid dissociation group;
• at least one of R4 is an acid dissociation group;
• structural formulas of repeating units in the formulas (1-2) and (2-2) may be the same as or different from each other;
• n is an integer of 1 to 4;
• in the formula (1-2), each m4 is independently an integer of 0 to 6;
• and in the formula (2-2), each m6 is independently an integer of 0 to 5, and each q is 1;
• wherein each acid dissociation group is independently selected from the group consisting of a substituted methyl group, a 1-substituted ethyl group, a 1-substituted n-propyl group, a 1-branched alkyl group having 5 to 18 carbon atoms, an isopropyl group, a silyl group, an acyl group, a 1-substituted alkoxymethyl group, an alkoxycarbonyl group, and an alkoxycarbonylalkyl group
• wherein the substituted methyl group includes at least one group selected from a methoxymethyl group, a methylthiomethyl group, an ethoxymethyl group, a n-propoxymethyl group, an isopropoxymethyl group, a n-butoxymethyl group, a 2-methylpropoxymethyl group, an ethylthiomethyl group, a methoxyethoxymethyl group, a phenyloxymethyl group, a 1-cyclopentyloxymethyl group, a 1-cyclohexyloxymethyl group, a benzylthiomethyl group, a phenacyl group, a 4-bromophenacyl group, a 4-methoxyphenacyl group, a piperonyl group, and a substituent represented by the following formulae (13-1),
• wherein R″ is an alkyl group of 1 to 4 carbon atoms.