Apparatuses and methods for laser processing
AssigneeCorning Incorporated
InventorsDaniel Schnitzler, Helmut Schillinger
Life of this patent
Estimating the term…
Abstract
A workpiece may be laser processed by a method that may include forming a contour line in the workpiece, and directing an infrared laser beam onto the workpiece along or near the contour line to separate the workpiece along the contour line. The contour line may include defects in the workpiece. The infrared laser beam may have a beam profile such that a greater distribution of cumulated energy from the infrared laser beam is located in areas adjacent to the contour line than directly on the contour line.
Claims20
A method for laser processing a workpiece, the method comprising:
- forming a contour line in the workpiece, the contour line comprising defects in the workpiece;
- and
- directing an infrared laser beam onto the workpiece along or near the contour line to separate the workpiece along the contour line, wherein the infrared laser beam has an annular beam profile such that a greater distribution of cumulated energy from the infrared laser beam is located in areas adjacent to the contour line than directly on the contour line.
A method for laser processing a workpiece, the method comprising:
- focusing a pulsed laser beam into a pulsed laser beam focal line directed into the workpiece, the pulsed laser beam focal line producing a line defect within the workpiece;
- translating the workpiece and the pulsed laser beam focal line relative to each other thereby laser forming a plurality of line defects along a contour line within the workpiece, wherein a spacing between adjacent line defects is from 5 microns to 15 microns;
- and
- directing an infrared laser beam onto the workpiece along or near the contour line to separate the workpiece along the contour line, wherein the infrared laser beam has a beam profile such that a greater distribution of cumulated energy from the infrared laser beam is located in areas adjacent to the contour line on both sides of the contour line than directly on the contour line.
Dependencies are inferred from the claim text.