Pulse width controller
AssigneeApplied Materials, Inc.
InventorTheodore P. Moffitt
Life of this patent
Estimating the term…
Abstract
A pulse width controller for a thermal processing system is disclosed. Pulsed electromagnetic radiation is directed through a rotatable wave plate to a polarizing beam splitter, which reflects and transmits according to the phase angle of the wave plate. Radiation transmitted by the polarizing beam splitter is directed into an optical circuit that returns the radiation to the polarizing beam splitter after a transit time. A second rotatable wave plate is positioned in the optical circuit. The polarizing beam splitter reflects and transmits the returned radiation according to the phase angle of the second rotatable wave plate. A second pulse width controller may be nested in the optical circuit, and any number of pulse width controllers may be nested.
Claims10
An optical apparatus, comprising:
- a first rotatable wave plate having an optical axis;
- a selective reflector positioned along the optical axis to propagate a first electromagnetic radiation along the optical axis;
- a first reflector positioned along the optical axis to receive the first electromagnetic radiation and to propagate a first deflected electromagnetic radiation along a first deflection axis;
- a second reflector positioned to receive the first deflected electromagnetic radiation from the first reflector and to propagate a second deflected electromagnetic radiation to the selective reflector;
- a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is perpendicular to the optical axis of the first rotatable wave plate, and wherein the second deflected electromagnetic radiation is propagated along the transmitting axis;
- a second rotatable wave plate positioned along the transmitting axis;
- a first actuator coupled to the first rotatable wave plate;
- a second actuator coupled to the second rotatable wave plate;
- and
- a controller coupled to the first actuator and second actuator.
A system for processing a substrate comprising:
- a source of electromagnetic energy;
- an optical system for focusing the electromagnetic energy;
- and
- a pulse width controller optically coupled to the source of electromagnetic energy and the optical system, the pulse width controller comprising:
- a first rotatable wave plate having an optical axis;
- a selective reflector positioned along the optical axis to propagate a first electromagnetic radiation along the optical axis;
- a first reflector positioned along the optical axis to receive the first electromagnetic radiation and to propagate a first deflected electromagnetic radiation along a first deflection axis;
- a second reflector positioned to receive the first deflected electromagnetic radiation from the first reflector and to propagate a second deflected electromagnetic radiation to the selective reflector;
- a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is perpendicular to the optical axis of the first rotatable wave plate, and wherein the second deflected electromagnetic radiation is propagated along the transmitting axis;
- a second rotatable wave plate positioned along the transmitting axis;
- a first actuator coupled to the first rotatable wave plate;
- a second actuator coupled to the second rotatable wave plate;
- and
- a controller coupled to the first actuator and second actuator.
A system for processing a substrate, comprising:
- a first rotatable wave plate having an optical axis;
- and
- an optical circuit comprising:
- a selective reflector positioned along the optical axis to propagate a first electromagnetic radiation along the optical axis;
- a first reflector positioned along the optical axis to receive the first electromagnetic radiation and to propagate a first deflected electromagnetic radiation along a first deflection axis;
- a second reflector positioned to receive the first deflected electromagnetic radiation from the first reflector and to propagate a second deflected electromagnetic radiation to the selective reflector;
- a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is perpendicular to the optical axis of the first rotatable wave plate, and wherein the second deflected electromagnetic radiation is propagated along the transmitting axis;
- a second rotatable wave plate positioned along the transmitting axis;
- a first actuator coupled to the first rotatable wave plate;
- a second actuator coupled to the second rotatable wave plate;
- and
- a controller coupled to the first actuator and second actuator.
Dependencies are inferred from the claim text.