Laser processing robot system and laser processing method

A robot system for carrying out laser processing of an object to be processed by irradiating a laser beam onto a predetermined position of the object, the robot system comprising:

• a robot having a movable section;
• a laser irradiation device having a variable mechanism configured to change a laser irradiation position with respect to at least one direction;
• a first robot motion executing section configured to execute a first robot motion in which the laser irradiation device is moved to a predetermined command position;
• a device position measuring section configured to measure an actual position of the laser irradiation device in a three-dimensional space in the first robot motion;
• a deviation storing section configured to calculate a deviation between the command position and the actual position in the three-dimensional space of the laser irradiation device measured by the device position measuring section in the first robot motion, and store the calculated deviation as a time series of deviation data;
• a laser irradiation position correcting section configured to correct the laser irradiation position so as to coincide with a desired position, based on the deviation data stored in the deviation storing section;
• and
• a second robot motion executing section configured to execute a second robot motion while the laser irradiation position is corrected by the laser irradiation position correcting section.