# US 10,375,810 B2 · Capacitively coupled devices and oscillators

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- Number: US 10,375,810 B2
- Document ID: US10375810B2
- Status: Granted
- Kind: B2
- Application number: 15/293,903
- Filed: 2016-10-14
- Published: 2017-05-11
- Granted: 2019-08-06
- Earliest claimed: 2013-04-08
- Assignees: PerkinElmer Health Sciences, Inc.
- Applicants: Perkinelmer Health Sciences, Inc.
- Inventors: Peter J Morrisroe
- Web page: https://patentgrep.com/patent/US10375810B2

## CPC

- H05H 1/30: using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/28 takes precedence)
- H01J 49/105: {using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]}
- H05H 1/2406: {using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes}
- H05H 1/246: {the plasma being activated using external electrodes (H05H1/245 takes precedence)}
- H05H 1/46: using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence)
- H05H 1/2465: {the plasma being activated by inductive coupling, e.g. using coiled electrodes}
- H05H 1/466: {using capacitive coupling means, e.g. electrodes}
- H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Certain embodiments described herein are directed to devices that can be used to sustain a capacitively coupled plasma. In some examples, a capacitive device can be used to sustain a capacitively coupled plasma in a torch in the absence of any substantial inductive coupling. In certain embodiments, a helium gas flow can be used with the capacitive device to sustain a capacitively coupled plasma.

## Claims

### Claim 1

A method of sustaining a capacitively coupled plasma comprising:
introducing a gas flow into a torch body comprising alumina, wherein the gas flow comprises helium gas; and
providing radio frequency energy to the torch body using a capacitive device configured to sustain the capacitively coupled plasma in the torch body comprising the alumina, in which the capacitive device contacts an external surface of the torch body, wherein the capacitive device comprises a wire coil comprising a plurality of coils coupled to each other and positioned external to and coiled around the torch body with the wire coils forming an aperture that receives the torch body, in which the wire coil is configured to couple to an oscillator at a first end of the wire coil to provide the radio frequency energy and contacts the external surface of the torch at a second terminal end of the wire coil to provide capacitive coupling to the torch.

### Claim 2 (depends on 1)

The method of claim 1, further comprising sustaining the capacitively coupled plasma in the absence of any substantial inductive coupling.

### Claim 3 (depends on 1)

The method of claim 1, further comprising configuring the helium gas flow at a flow rate of about 0.5 Liters/minute or less.

### Claim 4 (depends on 1)

The method of claim 1, further comprising configuring the plurality of coils to comprise a plurality of wires each of which is coupled to adjacent wires and each of which contacts the external surface of the torch.

### Claim 5 (depends on 1)

The method of claim 1, further comprising sustaining the capacitively coupled plasma in the absence of an injector.

### Claim 6 (depends on 1)

The method of claim 1, further comprising configuring the capacitive device as a substantially cylindrical wire coil that surrounds at least a portion of the torch.

### Claim 7 (depends on 6)

The method of claim 6, further comprising cooling the oscillator using ambient air.

### Claim 8 (depends on 1)

The method of claim 1, further comprising using a portable power source to power the capacitive device.

### Claim 9 (depends on 1)

The method of claim 1, further comprising using a battery to power the capacitive device.

### Claim 10 (depends on 1)

The method of claim 1, further comprising using a power source of about 500 Watts or less to power the capacitive device.

### Claim 11 (depends on 1)

The method of claim 1, further comprising using a 110-120 Volts alternating current source to power the capacitive device.

### Claim 12 (depends on 1)

The method of claim 1, further comprising using an additional capacitive device to provide radio frequency energy to the torch.

### Claim 13 (depends on 12)

The method of claim 12, further comprising configuring the additional capacitive device as a wire coil comprising a plurality of coils coupled to each other.

### Claim 14 (depends on 12)

The method of claim 12, further comprising configuring the additional capacitive device as a plate electrode.

### Claim 15 (depends on 12)

The method of claim 12, further comprising electrically coupling the capacitive device and the additional capacitive device to the same oscillator.

### Claim 16 (depends on 12)

The method of claim 12, further comprising electrically coupling each of the capacitive device and the additional capacitive device to a different oscillator.

### Claim 17 (depends on 1)

The method of claim 1, further comprising configuring the torch as an alumina torch comprising a hollow cylindrical body, and configuring the gas flow as a helium gas flow.

### Claim 18 (depends on 1)

The method of claim 1, further comprising configuring the capacitive device to sustain the capacitively coupled plasma in the torch when it is present by itself and without any inductive device comprising an induction coil or a plate electrode.
