Resonance device and manufacturing method therefor

A resonance device comprising:

• a frame;
• and
• a resonator disposed in the frame with at least one holding arm connecting the resonator to the frame, the resonator including a base and a plurality of vibration arms extending therefrom,
• wherein each of the plurality of vibration arms includes an adjustment portion disposed on a first surface thereof facing one of a upper cover and a lower cover of the resonance device, such that each of the plurality of vibration arms has greater thickness where the adjustment portion is disposed than another region of the respective vibration arm.

A method for manufacturing a resonance device, the method comprising:

• preparing a lower cover formed from a non-degenerate silicon;
• disposing a substrate formed from degenerate silicon such that a lower surface of the substrate faces the lower cover;
• forming a resonator by sequentially forming a first electrode layer, a piezoelectric film, and a second electrode layer on an upper surface of the substrate;
• disposing an upper cover formed from silicon above the resonator, such that the resonator is interposed between the upper and lower covers;
• and
• irradiating the lower surface of the substrate with a laser via the lower cover to form an adjustment portion in a region, such that the substrate has a different thickness where the adjustment portion is disposed than a thickness in another region of the substrate.