# US 10,374,358 B2 · Feeder-cover structure and semiconductor production apparatus

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- Number: US 10,374,358 B2
- Document ID: US10374358B2
- Status: Granted
- Kind: B2
- Application number: 14/597,312
- Filed: 2015-01-15
- Published: 2015-07-30
- Granted: 2019-08-06
- Earliest claimed: 2014-01-29
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Ryota Sakane; Dai Kitagawa
- Web page: https://patentgrep.com/patent/US10374358B2

## CPC

- H01R 13/631: for engagement only
- C23C 16/4586: {Elements in the interior of the support, e.g. electrodes, heating or cooling devices}
- C23C 16/5096: {Flat-bed apparatus}
- H01J 37/32577: {Electrical connecting means}
- H01R 13/53: Bases or cases for heavy duty; Bases or cases {for high voltage} with means for preventing corona or arcing
- C23C 16/509: using internal electrodes
- H01R 2103/00: Two poles
- H01R: ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A feeder-cover structure includes a power feeder including a socket and a plug fitted together, a cover structure that covers and seals the power feeder, and a supply mechanism that supplies dry air or an inert gas into the cover structure. A gap is formed between the power feeder and the cover structure such that the dry air or the inert gas is supplied through the gap into the cover structure.

## Claims

### Claim 1

A feeder-cover structure, comprising:
a power feeder including a socket and a plug that are fitted together and electrically connected to each other;
a cover structure that covers and seals the power feeder; and
a supply mechanism that supplies one of dry air and an inert gas into the cover structure, wherein
the cover structure includes a first cover structure for covering the plug and a second cover structure for covering the socket, the first cover structure also housing the second cover structure;
a gap is formed between the socket and the second cover structure to surround an entire circumference of the socket, the gap forming a part of a flow path and allowing the one of the dry air and the inert gas to flow around the entire circumference of the socket;
the supply mechanism communicates with the gap between the socket and the second cover structure;
the socket is attached to an electrostatic chuck, and the plug is attached to a heater filter; and
the socket and the second cover structure are supported such that the socket and the second cover structure are slidable relative to the electrostatic chuck in a direction that is orthogonal to a direction in which the plug is inserted into the socket.

### Claim 2 (depends on 1)

The feeder-cover structure as claimed in claim 1, wherein an end of at least one of the first cover structure and the second cover structure is tapered.

### Claim 3 (depends on 2)

The feeder-cover structure as claimed in claim 2, wherein
the tapered end of the at least one of the first cover structure and the second cover structure is configured to guide the second cover structure relative to the first cover structure and thereby cause the socket to slide relative to the electrostatic chuck to correct misalignment between the socket and the plug.

### Claim 4 (depends on 1)

The feeder-cover structure as claimed in claim 1, wherein at least one of the first cover structure and the second cover structure comprises an insulating material.

### Claim 5 (depends on 1)

The feeder-cover structure as claimed in claim 1, wherein the first cover structure and the second cover structure comprise a resin material.

### Claim 6

A semiconductor production apparatus, comprising:
a mount table;
an electrostatic chuck disposed on the mount table;
a heater provided in the electrostatic chuck;
a feeder-cover structure; and
a power source that supplies an electric current to the heater, wherein
the feeder-cover structure includes
a power feeder that connects the power source to the electrostatic chuck and includes a socket and a plug that are fitted together and electrically connected to each other,
a cover structure that covers and seals the power feeder, and
a supply mechanism that supplies one of dry air and an inert gas into the cover structure;
the cover structure includes a first cover structure for covering the plug and a second cover structure for covering the socket, the first cover structure also housing the second cover structure;
a gap is formed between the socket and the second cover structure to surround an entire circumference of the socket, the gap forming a part of a flow path and allowing the one of the dry air and the inert gas to flow around the entire circumference of the socket;
the supply mechanism communicates with the gap between the socket and the second cover structure;
the socket is attached to the electrostatic chuck, and the plug is attached to a heater filter; and
the socket and the second cover structure are supported such that the socket and the second cover structure are slidable relative to the electrostatic chuck in a direction that is orthogonal to a direction in which the plug is inserted into the socket.

### Claim 7

A feeder-cover structure, comprising:
a first power feeder including a first socket and a first plug fitted together;
a second power feeder including a second socket and a second plug fitted together;
a first cover structure for covering the first plug and the second plug;
a first-socket cover structure for covering the first socket;
a second-socket cover structure for covering the second socket, the first-socket cover structure being separate from the second-socket cover structure;
a third cover structure that connects an upper end of the first-socket cover structure to an upper end of the second-socket cover structure; and
a supply mechanism that supplies one of dry air and an inert gas, wherein
the first cover structure is configured to also cover the first-socket cover structure and the second-socket cover structure;
a first gap is formed between the first socket and the first-socket cover structure to surround an entire circumference of the first socket, the first gap allowing the one of the dry air and the inert gas to flow around the entire circumference of the first socket;
a second gap is formed between the second socket and the second-socket cover structure to surround an entire circumference of the second socket, the second gap allowing the one of the dry air and the inert gas to flow around the entire circumference of the second socket;
a path connecting the first gap and the second gap is formed by the third cover structure;
the feeder-cover structure is configured such that the one of the dry air and the inert gas supplied from the supply mechanism flows through the first gap into the path connecting the first gap and the second gap, flows through the path into the second gap, and then flows through the second gap;
the first socket and the second socket are attached to an electrostatic chuck; and
the first socket, the second socket, the first-socket cover structure, and the second-socket cover structure are supported so as to be slidable relative to the electrostatic chuck in a direction that is orthogonal to a direction in which the first plug and the second plug are inserted into the first socket and the second socket.

### Claim 8 (depends on 7)

The feeder-cover structure as claimed in claim 7, wherein
the third cover structure supports the upper end of the first-socket cover structure and the upper end of the second-socket cover structure.

### Claim 9 (depends on 7)

The feeder-cover structure as claimed in claim 7, wherein
the first cover structure includes holes in which the first-socket cover structure and the second-socket cover structure are placed; and
the supply mechanism is configured to supply the one of the dry air and the inert gas into one of the holes of the first cover structure in which the first-socket cover structure is placed.