# US 10,374,184 B2 · Light-emitting device and manufacturing method thereof

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- Number: US 10,374,184 B2
- Document ID: US10374184B2
- Status: Granted
- Kind: B2
- Application number: 15/332,195
- Filed: 2016-10-24
- Published: 2017-02-09
- Granted: 2019-08-06
- Earliest claimed: 2009-09-16
- Assignees: Semiconductor Energy Laboratory Co., Ltd.
- Applicants: Semiconductor Energy Laboratory Co., Ltd.
- Inventors: Shingo Eguchi; Yoshiaki Oikawa; Kenichi Okazaki; Hotaka Maruyama
- Web page: https://patentgrep.com/patent/US10374184B2

## CPC

- H10K 50/11: characterised by the electroluminescent [EL] layers
- H10D 86/00: Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D 86/423: {comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO}
- H10D 86/60: wherein the TFTs are in active matrices
- H10K 59/1213: {the pixel elements being TFTs}
- H10K 59/126: Shielding, e.g. light-blocking means over the TFTs
- H10K 59/131: Interconnections, e.g. wiring lines or terminals
- H10K 77/111: {Flexible substrates}
- H10D 30/6732: {Bottom-gate only TFTs}
- H10D 30/6745: {Polycrystalline or microcrystalline silicon}
- H10D 30/6755: {Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate}
- H10D 86/441: {Interconnections, e.g. scanning lines}
- Y02E 10/549: Organic PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

An object of the invention is to improve the reliability of a light-emitting device. Another object of the invention is to provide flexibility to a light-emitting device having a thin film transistor using an oxide semiconductor film. A light-emitting device has, over one flexible substrate, a driving circuit portion including a thin film transistor for a driving circuit and a pixel portion including a thin film transistor for a pixel. The thin film transistor for a driving circuit and the thin film transistor for a pixel are inverted staggered thin film transistors including an oxide semiconductor layer which is in contact with a part of an oxide insulating layer.

## Claims

### Claim 1

An electronic device comprising a display panel having a display region, and a housing incorporating the display panel,
wherein the display panel comprises a display element and a transistor electrically connected to the display element,
wherein the transistor is formed over a first insulating layer,
wherein the display panel includes a region where the display panel is bent,
wherein the display region overlaps with the region where the display panel is bent,
wherein the display panel comprises:
a flexible substrate;
a driving circuit portion over the flexible substrate, comprising:
the transistor comprising:
a gate over the flexible substrate;
a second insulating layer over the gate;
a semiconductor layer over the second insulating layer;
a source over the semiconductor layer;
a drain over the semiconductor layer;
a third insulating layer over the semiconductor layer, the source, and the drain, a part of the third insulating layer being in contact with a part of the semiconductor layer between the source and the drain; and
a conductive layer over the third insulating layer, the conductive layer overlapping with the gate and a channel region of the transistor, wherein the channel region is between the source and the drain; and
a terminal portion comprising:
a first electrode layer over the flexible substrate;
the second insulating layer over the first electrode layer, the second insulating layer including a first contact hole;
a second electrode layer over and in contact with the first electrode layer through the first contact hole;
the third insulating layer over the second electrode layer, the third insulating layer including a second contact hole; and
a third electrode layer over and in contact with the second electrode layer through the second contact hole,
wherein the first electrode layer is formed from a same layer as the gate,
wherein the second electrode layer is formed from a same layer as the source and the drain, and
wherein the third electrode layer is formed from a same layer as the conductive layer.

### Claim 2 (depends on 1)

The electronic device according to claim 1, wherein the transistor comprises a channel formation region which comprises an oxide semiconductor material.

### Claim 3 (depends on 1)

The electronic device according to claim 1, wherein the transistor comprises a channel formation region which comprises polycrystalline silicon.

### Claim 4 (depends on 1)

The electronic device according to claim 1, wherein the electronic device is a mobile phone.

### Claim 5 (depends on 1)

The electronic device according to claim 1, wherein the flexible substrate is a plastic substrate having a light-transmitting property.

### Claim 6 (depends on 1)

The electronic device according to claim 1, wherein the flexible substrate comprises a polyester resin, a polyacrylonitrile resin, a polyimide resin, a polymethyl methacrylate resin, a polycarbonate (PC) resin, a polyethersulfone (PES) resin, a polyamide resin, a cycloolefin resin, a polystyrene resin, a polyamide imide resin, or a polyvinylchloride resin.

### Claim 7 (depends on 1)

The electronic device according to claim 1, wherein the first insulating layer comprises at least one layer selected from the group consisting of a silicon oxide layer, a silicon nitride layer, a silicon oxide layer containing nitrogen, and a silicon nitride layer containing oxygen.

### Claim 8

An electronic device comprising:
a housing;
a display panel comprising a transistor, wherein the display panel comprises a display region, the display region comprising a first region and a second region, the first region disposed at a front of the housing, and the second region disposed between the first region and an edge of the display panel,
wherein the transistor is formed over a first insulating layer;
wherein the display panel is bent at least in a region between the first region and the second region,
wherein the display region overlaps with the region where the display panel is bent,
wherein the display panel comprises:
a flexible substrate;
a driving circuit portion over the flexible substrate, comprising:
the transistor comprising:
a gate over the flexible substrate;
a second insulating layer over the gate;
a semiconductor layer over the second insulating layer;
a source over the semiconductor layer;
a drain over the semiconductor layer;
a third insulating layer over the semiconductor layer, the source, and the drain, a part of the third insulating layer being in contact with a part of the semiconductor layer between the source and the drain; and
a conductive layer over the third insulating layer, the conductive layer overlapping with the gate and a channel region of the transistor, wherein the channel region is between the source and the drain; and
a terminal portion comprising:
a first electrode layer over the flexible substrate;
the second insulating layer over the first electrode layer, the second insulating layer including a first contact hole;
a second electrode layer over and in contact with the first electrode layer through the first contact hole;
the third insulating layer over the second electrode layer, the third insulating layer including a second contact hole; and
a third electrode layer over and in contact with the second electrode layer through the second contact hole,
wherein the first electrode layer is formed from a same layer as the gate,
wherein the second electrode layer is formed from a same layer as the source and the drain, and
wherein the third electrode layer is formed from a same layer as the conductive layer.

### Claim 9 (depends on 8)

The electronic device according to claim 8, wherein the transistor comprises a channel formation region which comprises an oxide semiconductor material.

### Claim 10 (depends on 8)

The electronic device according to claim 8, wherein the transistor comprises a channel formation region which comprises polycrystalline silicon.

### Claim 11 (depends on 8)

The electronic device according to claim 8, wherein the electronic device is a mobile phone.

### Claim 12 (depends on 8)

The electronic device according to claim 8, wherein the flexible substrate is a plastic substrate having a light-transmitting property.

### Claim 13 (depends on 8)

The electronic device according to claim 8, wherein the flexible substrate comprises a polyester resin, a polyacrylonitrile resin, a polyimide resin, a polymethyl methacrylate resin, a polycarbonate (PC) resin, a polyethersulfone (PES) resin, a polyamide resin, a cycloolefin resin, a polystyrene resin, a polyamide imide resin, or a polyvinylchloride resin.

### Claim 14 (depends on 8)

The electronic device according to claim 8, wherein the first insulating layer comprises at least one layer selected from the group consisting of a silicon oxide layer, a silicon nitride layer, a silicon oxide layer containing nitrogen, and a silicon nitride layer containing oxygen.

### Claim 15

An electronic device comprising:
a housing;
a display panel having a display region, wherein the display panel comprises a display element and a transistor electrically connected to the display element; and
a touch panel,
wherein the transistor is formed over a first insulating layer,
wherein the display panel includes a region where the display panel is bent,
wherein the display region and the touch panel overlap with the region where the display panel is bent,
wherein the display panel comprises:
a flexible substrate;
a driving circuit portion over the flexible substrate, comprising:
the transistor comprising:
a gate over the flexible substrate;
a second insulating layer over the gate;
a semiconductor layer over the second insulating layer;
a source over the semiconductor layer;
a drain over the semiconductor layer;
a third insulating layer over the semiconductor layer, the source, and the drain, a part of the third insulating layer being in contact with a part of the semiconductor layer between the source and the drain; and
a conductive layer over the third insulating layer, the conductive layer overlapping with the gate and a channel region of the transistor, wherein the channel region is between the source and the drain; and
a terminal portion comprising:
a first electrode layer over the flexible substrate;
the second insulating layer over the first electrode layer, the second insulating layer including a first contact hole;
a second electrode layer over and in contact with the first electrode layer through the first contact hole;
the third insulating layer over the second electrode layer, the third insulating layer including a second contact hole; and
a third electrode layer over and in contact with the second electrode layer through the second contact hole,
wherein the first electrode layer is formed from a same layer as the gate,
wherein the second electrode layer is formed from a same layer as the source and the drain, and
wherein the third electrode layer is formed from a same layer as the conductive layer.

### Claim 16 (depends on 15)

The electronic device according to claim 15, wherein the transistor comprises a channel formation region which comprises an oxide semiconductor material.

### Claim 17 (depends on 15)

The electronic device according to claim 15, wherein the transistor comprises a channel formation region which comprises polycrystalline silicon.

### Claim 18 (depends on 15)

The electronic device according to claim 15, wherein the electronic device is a mobile phone.

### Claim 19 (depends on 15)

The electronic device according to claim 15, wherein the flexible substrate is a plastic substrate having a light-transmitting property.

### Claim 20 (depends on 15)

The electronic device according to claim 15, wherein the flexible substrate comprises a polyester resin, a polyacrylonitrile resin, a polyimide resin, a polymethyl methacrylate resin, a polycarbonate (PC) resin, a polyethersulfone (PES) resin, a polyamide resin, a cycloolefin resin, a polystyrene resin, a polyamide imide resin, or a polyvinylchloride resin.

### Claim 21 (depends on 15)

The electronic device according to claim 15, wherein the first insulating layer comprises at least one layer selected from the group consisting of a silicon oxide layer, a silicon nitride layer, a silicon oxide layer containing nitrogen, and a silicon nitride layer containing oxygen.
