# US 10,374,161 B2 · Glass substrate separation method and glass substrate separation device

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- Number: US 10,374,161 B2
- Document ID: US10374161B2
- Status: Granted
- Kind: B2
- Application number: 16/124,890
- Filed: 2018-09-07
- Published: 2019-02-21
- Granted: 2019-08-06
- Earliest claimed: 2017-08-16
- Assignees: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicants: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Inventors: Shimin Chen
- Web page: https://patentgrep.com/patent/US10374161B2

## CPC

- H10K 71/80: using temporary substrates
- B32B 43/006: {Delaminating}
- B65G 49/067: {Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass (suction cups B65G49/061; combined with vertical conveyors C03B33/00 - C03B33/10; stacking and destacking B65G49/068)}
- B32B 38/10: Removing layers, or parts of layers, mechanically or chemically
- B32B 2457/206: Organic displays, e.g. OLED
- B65G 2249/04: Arrangements of vacuum systems or suction cups
- H10K 77/10: Substrates, e.g. flexible substrates
- H10K 77/111: {Flexible substrates}
- Y10T 156/1132: Using vacuum directly against work during delaminating
- Y10T 156/1184: Piercing layer during delaminating [e.g., cutting, etc.]
- Y10T 156/1944: Vacuum delaminating means [e.g., vacuum chamber, etc.]
- Y10T 156/1967: Cutting delaminating means
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Disclosed are a glass substrate separation device and a glass substrate separation method. A plurality of first vacuum adsorption devices is adsorbed on one end of the glass substrate to separate the one end of the glass substrate and an OLED with an opening with a certain distance, and a metal wire is driven to enter the opening, and abuts a lower surface of the glass substrate to move to the other end of the glass substrate to accomplish the separation between the glass substrate and the OLED; and then, a second vacuum adsorption device is adsorbed at an intermediate position of the glass substrate to remove the glass substrate from the OLED to realize a glass substrate removal process after a LLO in an OLED module production, thereby avoiding a damage to the OLED and a PI layer disposed on a surface layer of the OLED.

## Claims

### Claim 1

A glass substrate separation device, separating a glass substrate from an organic light emitting diode (OLED), wherein the glass substrate separation device comprises a lifting off platform, a plurality of first vacuum adsorption devices, a separation wire and a second vacuum adsorption device, wherein the OLED is adsorbed and fixed on the lifting off platform, and the plurality of first vacuum adsorption devices is adsorbed on a first position of the glass substrate and separates the glass substrate from the OLED to form an opening, wherein a distance between an edge of the OLED and an edge of the glass substrate is larger than the separation wire, and the separation wire is moved from the opening at one end of the glass substrate to the other end of the glass substrate against a lower surface of the glass substrate to separate the glass substrate from the OLED, and the second vacuum adsorption device is adsorbed on a second position of the glass substrate to remove the glass substrate from the OLED.

### Claim 2 (depends on 1)

The glass substrate separation device according to claim 1, wherein the lifting off platform is provided with a plurality of vacuum holes, and the OLED is placed on the lifting off platform, and the vacuum holes are connected to a vacuum device to adsorb the OLED on the lifting off platform.

### Claim 3 (depends on 2)

The glass substrate separation device according to claim 2, wherein the first position is at an edge of the one end of the glass substrate, and a first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 4 (depends on 1)

The glass substrate separation device according to claim 1, further comprising a first driving device, driving a first vacuum adsorption device to move in a direction toward the glass substrate so that the first vacuum adsorption device is adsorbed on the first position of the glass substrate.

### Claim 5 (depends on 4)

The glass substrate separation device according to claim 4, further comprising a second driving device, driving the second vacuum adsorption device to move in a direction toward the glass substrate so that the second vacuum adsorption device is adsorbed on the second position of the glass substrate; wherein the second driving device further drives the second vacuum adsorption device to move in a direction away from the OLED, and the glass substrate is raised at a predetermined rate by the second vacuum adsorption device to remove the glass substrate from the OLED.

### Claim 6 (depends on 5)

The glass substrate separation device according to claim 5, wherein the first position is at an edge of the one end of the glass substrate, and the first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 7 (depends on 4)

The glass substrate separation device according to claim 4, wherein the first position is at an edge of the one end of the glass substrate, and the first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 8 (depends on 1)

The glass substrate separation device according to claim 1, further comprising a control unit, controlling the separation wire to enter the opening of the one end of the glass substrate and abuts the lower surface of the glass substrate, and controlling the separation wire to move toward the other end of the glass substrate at a predetermined rate, wherein the separation wire is not in contact with a polyimide layer as a surface layer of the OLED during a whole moving process.

### Claim 9 (depends on 8)

The glass substrate separation device according to claim 8, wherein the first position is at an edge of the one end of the glass substrate, and a first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 10 (depends on 1)

The glass substrate separation device according to claim 1, wherein the first position is at an edge of the one end of the glass substrate, and a first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 11

A glass substrate separation method, separating a glass substrate from an organic light emitting diode (OLED), wherein the glass substrate separation method comprises:
providing a lifting off platform for adsorbing and fixing the OLED thereon;
separating the glass substrate from the OLED to form an opening with a plurality of first vacuum adsorption devices adsorbed on a first position of the glass substrate, wherein a diameter of the opening is larger than a diameter of a separation wire;
moving the separation wire from the opening at one end of the glass substrate to the other end of the glass substrate against a lower surface of the glass substrate to separate the glass substrate from the OLED while moving the plurality of first vacuum adsorption devices; and
removing the glass substrate from the OLED with a second vacuum adsorption device adsorbed on a second position of the glass substrate.

### Claim 12 (depends on 11)

The glass substrate separation method according to claim 11, wherein separating the glass substrate from the OLED to form the opening with the plurality of first vacuum adsorption devices adsorbed on the first position of the glass substrate, wherein the diameter of the opening is larger than the diameter of the separation wire, comprises:
driving the plurality of first vacuum adsorption devices to move in a direction toward the glass substrate to be adsorbed on the first position of the glass substrate;
driving the plurality of first vacuum adsorption devices to move in a direction away from the OLED to separate the glass substrate from the OLED to form the opening inbetween.

### Claim 13 (depends on 12)

The glass substrate separation method according to claim 12, wherein the first position is at an edge of the one end of the glass substrate, and the first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 14 (depends on 11)

The glass substrate separation method according to claim 11, wherein removing the glass substrate from the OLED with a second vacuum adsorption device adsorbed on a second position of the glass substrate, comprises:
driving the second vacuum adsorption device to move in a direction toward the glass substrate to be adsorbed on the second position of the glass substrate;
driving the second vacuum adsorption device to move in a direction away from the OLED to remove the glass substrate from the OLED.

### Claim 15 (depends on 14)

The glass substrate separation method according to claim 14, wherein the first position is at an edge of the one end of the glass substrate, and the first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.

### Claim 16 (depends on 11)

The glass substrate separation method according to claim 11, wherein the first position is at an edge of the one end of the glass substrate, and the first vacuum adsorption device is a folding vacuum suction nozzle; the second position is at an intermediate position of the glass substrate, and the second vacuum adsorption device is a folding vacuum suction nozzle, and a size of the second vacuum adsorption device is larger than a size of the first vacuum adsorption device.