# US 10,374,142 B2 · Surface acoustic wave device and manufacturing method therefor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,374,142 B2 - Document ID: US10374142B2 - Status: Granted - Kind: B2 - Application number: 15/041,120 - Filed: 2016-02-11 - Published: 2016-06-09 - Granted: 2019-08-06 - Earliest claimed: 2013-08-20 - Assignees: Murata Manufacturing Co., Ltd. - Applicants: Murata Manufacturing Co., Ltd. - Inventors: Daisuke Ajima; Seiji Kai - Web page: https://patentgrep.com/patent/US10374142B2 ## CPC - H10N 30/40: with electrical input and electrical output, e.g. functioning as transformers - H03H 3/08: for the manufacture of resonators or networks using surface acoustic waves - H03H 9/059: {consisting of mounting pads or bumps} - H10N 30/06: Forming electrodes or interconnections, e.g. leads or terminals - H10W 76/60: Seals - H10W 72/012: {of bump connectors, dummy bumps or thermal bumps} - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P) - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract In a surface acoustic wave device, a conductor pattern is located on a main surface of a piezoelectric substrate and includes a surface acoustic wave element pattern, a pad and a feed line that is electrically connected to the pad and extends up to an outer peripheral edge of the main surface. The piezoelectric substrate and a cover are bonded to each other with a support layer therebetween that includes a frame extending along the outer peripheral edge of the main surface so that a gap is provided between the frame and the outer peripheral edge and includes a pad adjacent portion on the pad. Thus, a closed space is surrounded by the piezoelectric substrate, the cover and the frame. The support layer further includes a reinforcement portion that intersects a feed line at or near an intersection portion in which a separated portion of the frame that is separated from the pad adjacent portion intersects the feed line. ## Claims ### Claim 1 A surface acoustic wave device comprising: a piezoelectric substrate including a main surface; a conductor pattern located on the main surface and including a surface acoustic wave element pattern, a pad and a feed line that is electrically connected to the pad and extends up to an outer peripheral edge of the main surface; a support layer including a frame that is located on the main surface and has a frame-shaped structure that extends along the outer peripheral edge of the main surface and so that a gap is provided between the frame and the outer peripheral edge, and a pad adjacent portion that is located on the pad; a cover that is bonded to the support layer and faces the main surface; and a through conductor that is electrically connected to the pad and is located inside a through hole that penetrates through the pad adjacent portion of the support layer in a direction in which the main surface is viewed in plan; wherein a closed space is provided and surrounded by the piezoelectric substrate, the cover and the support layer; the feed line includes a separated feed line that intersects a separated portion of the frame that is separated from the pad adjacent portion; and the support layer further includes a reinforcement portion that is located on the main surface and intersects the separated feed line close to the separated portion. ### Claim 2 (depends on 1) The surface acoustic wave device according to claim 1, wherein the reinforcement portion is located on an outer side of the frame; and a width of the reinforcement portion, which is a dimension in a direction in which the reinforcement portion intersects the separated feed line, progressively becomes larger toward the frame. ### Claim 3 (depends on 1) The surface acoustic wave device according to claim 1, wherein the reinforcement portion is located on an outer side of the frame; and a width of the reinforcement portion, which is a dimension in a direction in which the reinforcement portion intersects the separated feed line, becomes larger in a stepwise manner toward the frame. ### Claim 4 (depends on 1) The surface acoustic wave device according to claim 1, wherein the reinforcement portion is located outside the frame and is separated from the frame. ### Claim 5 (depends on 1) The surface acoustic wave device according to claim 1, wherein the reinforcement portion is integrated with the frame on an outer side of the frame. ### Claim 6 (depends on 1) The surface acoustic wave device according to claim 1, wherein the reinforcement portion includes a plurality of reinforcement portions provided only in portions of the support layer. ### Claim 7 (depends on 1) The surface acoustic wave device according to claim 1, wherein the reinforcement portion includes a plurality of reinforcement portions integrated with the frame on an outer same of the frame. ### Claim 8 (depends on 7) The surface acoustic wave device according to claim 7, wherein a width of each of the reinforcement portions, which is a dimension in a direction in which the plurality of reinforcement portions intersect the separated feed line, progressively becomes larger toward the frame. ### Claim 9 (depends on 7) The surface acoustic wave device according to claim 7, wherein the reinforcement portion is integrated with the frame on an outer same of the frame, and a width of the reinforcement portion, which is a dimension in a direction in which the plurality of reinforcement portions intersect the separated feed line, progressively becomes larger in a stepwise manner toward the frame. ### Claim 10 (depends on 7) The surface acoustic wave device according to claim 7, wherein the separated feed line is one of a single layer feed line and a two layer feed line.