# US 10,374,140 B2 · Piezoelectric device for ultrasonic sensor

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- Number: US 10,374,140 B2
- Document ID: US10374140B2
- Status: Granted
- Kind: B2
- Application number: 15/379,949
- Filed: 2016-12-15
- Published: 2017-06-22
- Granted: 2019-08-06
- Earliest claimed: 2015-12-17
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Takayuki Yonemura; Tomohide Onogi; Chikara Kojima
- Web page: https://patentgrep.com/patent/US10374140B2

## CPC

- H10N 30/877: {Conductive materials}
- B06B 1/0622: {on one surface}
- B06B 1/0629: {Square array}
- H10N 30/2047: {Membrane type}
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R)

## Abstract

A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.

## Claims

### Claim 1

A piezoelectric device for an ultrasonic sensor comprising:
a substrate with a cavity;
a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity;
a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer which is provided on the first electrode, and a second electrode which is provided on the piezoelectric layer,
wherein the second electrode has a laminated structure including a platinum layer and a first iridium layer,
the platinum layer is in contact with the piezoelectric layer,
if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the first iridium layer is extended to an outside of the piezoelectric element and the cavity at least in the X direction on an X-Y plane view,
a second iridium layer is extended to the outside of the piezoelectric element and the cavity in the Y direction on the X-Y plane view, and
the second iridium layer is separated from the first iridium layer, on the piezoelectric layer.

### Claim 2 (depends on 1)

The piezoelectric device for an ultrasonic sensor according to claim 1,
wherein the piezoelectric layer is present in the cavity, and
wherein the platinum layer is present only on the piezoelectric layer in the X direction.

### Claim 3 (depends on 1)

The piezoelectric device for an ultrasonic sensor according to claim 1,
wherein the piezoelectric layer is present in the cavity, and
wherein the second iridium layer is extended from both end portions on the piezoelectric layer to the outside of the cavity in the Y direction, and a second platinum layer which is separated from the platinum layer is present between the both end portions of the piezoelectric layer and the second iridium layer.