# US 10,374,043 B2 · Semiconductor device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,374,043 B2 - Document ID: US10374043B2 - Status: Granted - Kind: B2 - Application number: 15/367,065 - Filed: 2016-12-01 - Published: 2017-03-23 - Granted: 2019-08-06 - Earliest claimed: 2014-12-25 - Assignees: Fuji Electric Co., Ltd. - Applicants: Fuji Electric Co., Ltd. - Inventors: Shoji Kitamura - Web page: https://patentgrep.com/patent/US10374043B2 ## CPC - H10D 62/8325: {Silicon carbide} - H10D 8/051: {of Schottky diodes} - H10D 8/60: Schottky-barrier diodes - H10D 62/105: {by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] (IGFETs having LDD or drain extension regions H10D30/601)} - H10D 62/106: {having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions} - H10D 62/107: {Buried supplementary regions, e.g. buried guard rings (multi-RESURF H10D62/111)} - H10D 62/60: Impurity distributions or concentrations - H10P 30/22: using masks - H10D 8/411: {PN diodes having planar bodies} - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract In an edge termination structure portion, first and second JTE regions are disposed concentrically surrounding an active region. Between the first and second JTE regions, a p-type electric field relaxation region is disposed that includes a first subregion and a second subregion alternately and repeatedly arranged concentrically surround a periphery of the first JTE region. An average impurity concentration of the electric field relaxation region is higher that the impurity concentration of the first JTE region adjacent on the inner side and lower than the impurity concentration of the second JTE region adjacent on the outer side. First subregions have widths that decrease the farther outward they are arranged. Second subregions have widths that are substantially the same independent of position. The first subregions and the first JTE region have equal impurity concentrations. The second subregions and the second JTE region have equal impurity concentrations. ## Claims ### Claim 1 A semiconductor device comprising: a semiconductor substrate of a first conductivity type, formed of a silicon carbide semiconductor; an active region disposed on a front surface of the semiconductor substrate and through which a main current flows, the active region having a periphery; and an edge termination structure surrounding a periphery of the active region, wherein the edge termination structure includes: a plurality of semiconductor regions of a second conductivity type, disposed concentrically surrounding the periphery of the active region, each semiconductor region having a lower impurity concentration the further the semiconductor region is from the periphery, and an intermediate region of the second conductivity type, disposed so as to mutually contact adjacent ones of the plurality of semiconductor regions, the intermediate region having an impurity concentration that is lower than that of the adjacent semiconductor region on a side closer to the periphery and an impurity concentration that is higher than that of the adjacent semiconductor region on a side further from the periphery, the intermediate region includes a first subregion of the second conductivity type and a second subregion of the second conductivity type, the second subregion having an impurity concentration that is lower than that of the first subregion, a plurality of the first and second subregions being alternately and repeatedly arranged concentrically surrounding the adjacent semiconductor region on the side closer to the periphery of the active region, the plurality of second subregions having a same width, and the plurality of first subregions having respective widths that are narrower the farther from the periphery of the active region the first subregions are arranged. ### Claim 2 (depends on 1) The semiconductor device according to claim 1, each intermediate region further comprising a third subregion disposed outermost from the periphery of the active region in the intermediate region and having an impurity concentration that is lower than that of the first subregion and an impurity concentration that is higher than that of the adjacent semiconductor region on a side further from the periphery. ### Claim 3 (depends on 2) The semiconductor device according to claim 2, wherein the third subregion includes a first portion of the second conductivity type having an impurity concentration that is lower than that of the first subregion, selectively disposed in a first region of an electric field relaxation region arranged outermost from the periphery of the active region in the intermediate region. ### Claim 4 (depends on 3) The semiconductor device according to claim 3, wherein the third subregion includes along a direction of a border of the active region and the edge termination structure portion, ones of the first subregion and the first portion being alternately and repeatedly arranged. ### Claim 5 (depends on 3) The semiconductor device according to claim 3, wherein the first portion has an impurity concentration that is a same as that of the adjacent one of the plurality of semiconductor regions on an outer side of the first portion relative to the periphery of the active region. ### Claim 6 (depends on 1) The semiconductor device according to claim 1, further comprising a fourth subregion disposed innermost to the periphery of the active region in each intermediate region and having an impurity concentration that is lower than that of an adjacent one of the semiconductor regions on a side closer to the periphery of the active region and an impurity concentration that is higher than that of the second subregion. ### Claim 7 (depends on 6) The semiconductor device according to claim 6, wherein the fourth subregion includes a second portion of the second conductivity type having an impurity concentration that is higher than that of the second subregion, selectively disposed in the second subregion arranged innermost to the periphery of the active region in each intermediate region. ### Claim 8 (depends on 7) The semiconductor device according to claim 7, wherein the fourth subregion includes along a direction of a border of the active region and the edge termination structure, a plurality of the second subregions and the second portions being alternately and repeatedly arranged. ### Claim 9 (depends on 7) The semiconductor device according to claim 7, wherein the second portion has an impurity concentration that is a same as that of the adjacent one of the plurality of semiconductor regions on the side of the second portion closer to the periphery of the active region. ### Claim 10 (depends on 1) The semiconductor device according to claim 1, each intermediate region further comprising a fifth subregion disposed between adjacent ones of the first subregion and the second subregion, the fifth subregion having an impurity concentration that is lower than that of the adjacent first subregion and an impurity concentration that is higher than that of the adjacent second subregion. ### Claim 11 (depends on 10) The semiconductor device according to claim 10, wherein the fifth subregion includes a third portion of the second conductivity type having an impurity concentration that is lower than that of the adjacent first subregion, selectively disposed in the adjacent first subregion. ### Claim 12 (depends on 11) The semiconductor device according to claim 11, wherein the fifth subregion includes along a direction of a border of the active region and the edge termination structure portion, a plurality of first subregions and third portions alternately and repeatedly arranged. ### Claim 13 (depends on 11) The semiconductor device according to claim 11, wherein the third portion is disposed proximate an interface of adjacent ones of the first subregion and the second subregion on an outer side of the first subregion from the periphery of the active region. ### Claim 14 (depends on 11) The semiconductor device according to claim 11, wherein the third portion has an impurity concentration that is a same as that of the adjacent one of the plurality of semiconductor regions on a side further from the third portion. ### Claim 15 (depends on 1) The semiconductor device according to claim 1, wherein the second subregion is arranged innermost to the periphery of the active region in each intermediate region, and the first subregion is arranged outermost from the periphery of the active region in each intermediate region. ### Claim 16 (depends on 1) The semiconductor device according to claim 1, wherein the first subregion has an impurity concentration that is a same as that of the adjacent one of the plurality of semiconductor regions on a side of the first subregion closer to the periphery of the active region. ### Claim 17 (depends on 1) The semiconductor device according to claim 1, wherein the second subregion has an impurity concentration that is a same as that of the adjacent one of the plurality of semiconductor regions on a side of the second subregion further from the periphery of the active region. ### Claim 18 (depends on 1) The semiconductor device according to claim 1, wherein the intermediate region has an average impurity concentration that is intermediate between an impurity concentration of an adjacent one of the semiconductor regions on a side closer to the periphery of the active region and an adjacent one of the semiconductor regions on a side further from the periphery of the active region. ### Claim 19 A semiconductor device, comprising: a semiconductor substrate of a first conductivity type, formed of a silicon carbide semiconductor; an active region disposed on a front surface of the semiconductor substrate and through which main current flows, the active region having a periphery; and an edge termination structure surrounding a periphery of the active region, wherein the edge termination structure includes: a plurality of semiconductor regions disposed concentrically surrounding a periphery of the active region, the farther outward a semiconductor region thereamong is arranged, the lower an impurity concentration thereof is, and an intermediate region disposed so as to mutually contact adjacent ones of the plurality of semiconductor regions, the intermediate region having an impurity concentration that is lower than that of the adjacent semiconductor region on a side closer to the periphery of the active region and an impurity concentration that is higher than that of the adjacent semiconductor region on a side further from the active region, the intermediate region is divided into a plurality of sections concentrically surrounding the adjacent semiconductor region on a side closer to the periphery of the active region, a plurality of first subregions of the second conductivity type and a plurality of second subregions of the second conductivity type, the plurality of second subregions of the second conductivity type having an impurity concentration that is lower than that of the plurality of first subregions of the second conductivity type, alternately and repeatedly arranged, are disposed concentrically in the sections from an inner side toward an outer side relative to the periphery of the active region, each of the plurality of sections has an average impurity concentration determined based on widths of the plurality of first subregions and the plurality of second subregions arranged in the said section, where the average impurity concentration is lower the farther outward the said section is arranged relative to the periphery of the active region, an average impurity concentration difference between all adjacent sections is equal, and a microregion including adjacent ones of the plurality of first subregions and the plurality of second subregions has an average impurity concentration equal to the average impurity concentration of the section in which the microregion is arranged. ### Claim 20 (depends on 19) The semiconductor device according to claim 19, further comprising a first portion of the second conductivity type, selectively disposed in a one of the plurality of first subregions arranged in the section positioned outermost relative to the periphery of the active region, the first portion having an impurity concentration that is lower than that of the one of the plurality of first subregions. ### Claim 21 (depends on 20) The semiconductor device according to claim 20, wherein the first portion is arranged at a predetermined interval along a direction of a border of the active region and the edge termination structure. ### Claim 22 (depends on 19) The semiconductor device according to claim 19, further comprising a second portion of the second conductivity type, selectively disposed in a one of the plurality of second subregions arranged in the section positioned innermost relative to the periphery of the active region, the second portion having an impurity concentration that is higher than that of the one of the plurality of second subregions. ### Claim 23 (depends on 22) The semiconductor device according to claim 22, wherein the second portion is arranged at a predetermined interval along a direction of a border of the active region and the edge termination structure. ### Claim 24 (depends on 19) The semiconductor device according to claim 19, wherein the microregion has an average impurity concentration Np satisfying the following equation: Np=((x1×np1)+(x2×np2))/(x1+x2) where, the width and the impurity concentration of the first subregion are x1 and np1, respectively, and the width and the impurity concentration of the second subregion are x2 and np2, respectively. ### Claim 25 (depends on 19) The semiconductor device according to claim 19, wherein the microregion is disposed at a same interval in a same section of the plurality of sections. ### Claim 26 (depends on 19) The semiconductor device according to claim 19, wherein the intermediate region has an average impurity concentration slope that is constant across the intermediate region entirely. ### Claim 27 (depends on 19) The semiconductor device according to claim 19, wherein the intermediate region has an average impurity concentration that is intermediate between an impurity concentration of an adjacent one of the semiconductor regions on a side closer to the periphery of the active region and an adjacent one of the semiconductor regions on a side further from the periphery of the active region. ### Claim 28 A semiconductor device, comprising: a semiconductor substrate of a first conductivity type, formed of a silicon carbide semiconductor; an active region disposed on a front surface of the semiconductor substrate and through which main current flows, the active region having a periphery; and an edge termination structure surrounding a periphery of the active region, wherein the edge termination structure includes: a plurality of semiconductor regions disposed concentrically surrounding a periphery of the active region, the farther outward a semiconductor region thereamong is arranged, the lower an impurity concentration thereof is, and an intermediate region disposed so as to mutually contact adjacent ones of the plurality of semiconductor regions, the intermediate region having an impurity concentration that is lower than that of the adjacent semiconductor region on a side closer to the periphery of the active region and an impurity concentration that is higher than that of the adjacent semiconductor region on a side further from the active region, the intermediate region is divided into a plurality of sections concentrically surrounding the adjacent semiconductor region on a side closer to the periphery of the active region, a plurality of first subregions of the second conductivity type and a plurality of second subregions of the second conductivity type, the plurality of second subregions of the second conductivity type having an impurity concentration that is lower than that of the plurality of first subregions of the second conductivity type, alternately and repeatedly arranged, are disposed concentrically in the sections from an inner side toward an outer side relative to the periphery of the active region, each of the plurality of sections has an average impurity concentration determined based on widths of the plurality of first subregions and the plurality of second subregions arranged in the said section, where the average impurity concentration is lower the farther outward the said section is arranged relative to the periphery of the active region, an average impurity concentration difference between all adjacent sections is equal, and the innermost section of the plurality of sections has an average impurity concentration that is 90 percent or more of the average impurity concentration of the semiconductor region adjacent on the inner side of the section relative to the periphery of the active region.