# US 10,373,905 B2 · Integrating metal-insulator-metal capacitors with air gap process flow > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,373,905 B2 - Document ID: US10373905B2 - Status: Granted - Kind: B2 - Application number: 15/951,208 - Filed: 2018-04-12 - Published: 2018-08-16 - Granted: 2019-08-06 - Earliest claimed: 2016-07-25 - Assignees: International Business Machines Corporation - Applicants: International Business Machines Corporation - Inventors: Veeraraghavan S. Basker; Kangguo Cheng; Theodorus E. Standaert; Junli Wang - Web page: https://patentgrep.com/patent/US10373905B2 ## CPC - H10W 20/496: {Capacitor integral with wiring layers} - H10D 1/692: {Electrodes} - H10W 20/072: {of dielectric parts comprising air gaps} - H10W 20/084: {for dual-damascene structures} - H10W 20/098: {by filling between adjacent conductive parts} - H10W 20/43: Layouts of interconnections - H10W 20/46: comprising air gaps - H10W 20/47: comprising two or more dielectric layers having different properties, e.g. different dielectric constants - H10W 20/48: Insulating materials thereof - H10D 1/68: Capacitors having no potential barriers - H10W 20/0888: {wherein via-level dielectrics are compositionally different than trench-level dielectrics} - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract Semiconductor devices are provided which have MIM (metal-insulator-metal) capacitor structures that are integrated within air gaps of on-chip interconnect structures, as well as methods for integrating MIM capacitor formation as part of an air gap process flow for fabricating on-chip interconnect structures. For example, a semiconductor device includes a dielectric layer with a first pattern of metal lines and second pattern of metal lines. Air gaps are disposed in spaces between the metal lines. Portions of the spaces between the metal lines of the first pattern of metal lines include a conformal layer of insulating material disposed on sidewalls of the metal lines and metallic material that fills the spaces between the metal lines. The first pattern of metal lines comprises a first capacitor electrode, the metallic fill material comprises a second capacitor electrode, and the conformal layer of insulating material comprises an insulating layer of a MIM capacitor structure. ## Claims ### Claim 1 A method, comprising: forming a dielectric layer on a substrate; forming metal lines in the dielectric layer, wherein the metal lines comprise a first pattern of metal lines and a second pattern of metal lines, wherein the first pattern of metal lines are commonly connected to each other to form a first capacitor electrode; etching the dielectric layer to form spaces between the metal lines of the first pattern of metal lines, and to form spaces between the metal lines of the second pattern of metal lines; forming a capping layer over the dielectric layer to form air gaps in the spaces between the metal lines of the first pattern of metal lines, and between the metal lines of the second pattern of metal lines patterning the capping layer to expose at least a portion of the first pattern of metal lines and the spaces between the metal lines of the exposed portion of the first pattern of metal lines; forming a conformal layer of insulating material on the exposed portion of the first pattern of metal lines, wherein the conformal layer of insulating material comprises a capacitor insulating layer; and depositing a layer of metallic material to fill the exposed spaces between the metal lines of the exposed portion of the first pattern of metal lines with the metallic material and to form a metallic layer over the exposed portion of the first pattern of metal lines, wherein the metallic material filled in the spaces and the metallic layer formed over the exposed portion of the first pattern of metal lines collectively form a second capacitor electrode. ### Claim 2 (depends on 1) The method of claim 1, wherein the first capacitor electrode, the capacitor insulating layer, and the second capacitor electrode form a MIM (metal-insulator-metal) capacitor structure. ### Claim 3 (depends on 2) The method of claim 2, wherein the MIM capacitor structure is integrally formed as part of a back-end-of-line structure of a semiconductor chip. ### Claim 4 (depends on 1) The method of claim 1, wherein forming the metal lines in the dielectric layer comprises forming damascene copper wiring in an ILD (interlayer dielectric layer) of a back-end-of-line structure of a semiconductor chip. ### Claim 5 (depends on 1) The method of claim 1, wherein forming the conformal layer of insulating material on the exposed portion of the first pattern of metal lines comprises depositing a conformal layer of insulating material to cover exposed surfaces of the metal lines of the exposed portion of the first pattern of metal lines and exposed surfaces of the dielectric layer within the spaces between the metal lines of the first pattern of metal lines. ### Claim 6 (depends on 1) The method of claim 1, wherein the conformal layer of insulating material comprises a high-k dielectric material with a dielectric constant of about 3.9 or greater. ### Claim 7 (depends on 1) The method of claim 1, wherein the second capacitor electrode comprises tungsten. ### Claim 8 (depends on 1) The method of claim 1, wherein depositing the layer of metallic material to fill the exposed spaces between the metal lines of the exposed portion of the first pattern of metal lines with the metallic material and to form the metallic layer over the exposed portion of the first pattern of metal lines, comprises: depositing the layer of metallic material to overfill the exposed spaces between the metal lines of the exposed portion of the first pattern of metal lines with the metallic material; performing a planarizing process to remove overburden portions of the conformal layer of insulating material and the layer of metallic material disposed on the capping layer, and to form a planarized surface in which surfaces of remaining portions of the capping layer and the metallic layer formed over the exposed portion of the first pattern of metal lines are coplanar. ### Claim 9 (depends on 8) The method of claim 8, further comprising: forming a second dielectric layer on the planarized surface; and forming wiring and vertical contacts in the second dielectric layer, wherein the vertical contacts provide electrical connections between the wiring and the second capacitor electrode. ### Claim 10 (depends on 1) The method of claim 1, wherein the metal lines comprise aluminum. ### Claim 11 (depends on 1) The method of claim 1, wherein the metal lines comprise tungsten. ### Claim 12 A method, comprising: forming an interlayer dielectric layer of a back-end-of-line structure on a substrate; forming metal lines in the interlayer dielectric layer, wherein the metal lines comprise a first pattern of metal lines and a second pattern of metal lines, wherein the first pattern of metal lines are commonly connected to each other to form a first capacitor electrode; etching the interlayer dielectric layer to form spaces between the metal lines of the first pattern of metal lines, and to form spaces between the metal lines of the second pattern of metal lines; forming a capping layer over the interlayer dielectric layer to cover the metal lines in the interlayer dielectric layer and to form air gaps in the spaces between the metal lines of the first pattern of metal lines, and in the spaces between the metal lines of the second pattern of metal lines; patterning the capping layer to remove a portion of the capping layer that covers at least a portion of the first pattern of metal lines and expose the first pattern of metal lines and the spaces between the metal lines of the exposed portion of the first pattern of metal lines; depositing a conformal layer of insulating material over exposed surfaces of the metal lines of the exposed portion of the first pattern of metal lines to form a capacitor insulating layer; and depositing a layer of metallic material over the conformal layer of insulating material to fill the exposed spaces between the metal lines of the exposed portion of the first pattern of metal lines with the metallic material and to form a metallic layer over the exposed portion of the first pattern of metal lines, wherein the metallic material filled in the spaces and the metallic layer formed over the exposed portion of the first pattern of metal lines collectively form a second capacitor electrode. ### Claim 13 (depends on 12) The method of claim 12, wherein the first capacitor electrode, the second capacitor electrode, and the capacitor insulating layer form a MIM (metal-insulator-metal) capacitor structure. ### Claim 14 (depends on 12) The method of claim 12, wherein forming the metal lines in the dielectric layer comprises forming damascene copper wiring in the interlayer dielectric layer of the back-end-of-line structure. ### Claim 15 (depends on 12) The method of claim 12, wherein depositing the conformal layer of insulating material over the exposed surfaces of the metal lines of the exposed portion of the first pattern of metal lines to form the capacitor insulating layer comprises depositing a conformal layer of insulating material to cover the exposed surfaces of the metal lines of the exposed portion of the first pattern of metal lines and exposed surfaces of the dielectric layer within the spaces between the metal lines of the exposed portion of the first pattern of metal lines. ### Claim 16 (depends on 12) The method of claim 12, wherein the conformal layer of insulating material comprises a high-k dielectric material with a dielectric constant of about 3.9 or greater. ### Claim 17 (depends on 12) The method of claim 12, wherein depositing the layer of metallic material over the conformal layer of insulating material comprises depositing a layer of tungsten. ### Claim 18 (depends on 12) The method of claim 12, further comprising performing a planarizing process to remove overburden portions of the conformal layer of insulating material and the layer of metallic material disposed on the capping layer, and to form a planarized surface in which surfaces of remaining portions of the capping layer and the metallic layer formed over the exposed portion of the first pattern of metal lines are coplanar. ### Claim 19 (depends on 12) The method of claim 12, wherein the metal lines comprise one of aluminum and tungsten. ### Claim 20 (depends on 18) The method of claim 18, further comprising: forming a second interlayer dielectric layer on the planarized surface; and forming wiring and vertical contacts in the second interlayer dielectric layer, wherein the vertical contacts provide electrical connections between the wiring and the second capacitor electrode.