# US 10,373,856 B2 · Transfer head array

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- Number: US 10,373,856 B2
- Document ID: US10373856B2
- Status: Granted
- Kind: B2
- Application number: 15/868,258
- Filed: 2018-01-11
- Published: 2018-05-17
- Granted: 2019-08-06
- Earliest claimed: 2015-08-03
- Assignees: Mikro Mesa Technology Co., Ltd.
- Applicants: Mikro Mesa Technology Co., Ltd.
- Inventors: Li-Yi Chen
- Web page: https://patentgrep.com/patent/US10373856B2

## CPC

- H10P 72/74: {using temporarily an auxiliary support}
- H10P 72/7428: {used to support diced chips prior to mounting}
- H10P 72/7434: {used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A transfer head array includes a body and a plurality of transfer heads. The body includes a base portion and at least one wall portion. The wall portion is located on and stationary to the base portion. The wall portion has a top surface. The transfer heads are located on the top surface of the wall portion. The wall portion is continuous at least between two of the transfer heads.

## Claims

### Claim 1

A transfer head array, comprising:
a body comprising:
a base portion; and
at least one wall portion located on and stationary to the base portion, wherein the at least one wall portion has a top surface, and the at least one wall portion defines at least one recess in the body; and
a plurality of transfer heads located on the top surface of the at least one wall portion, the at least one wall portion being continuous at least between two of the transfer heads, wherein a vertical projection of each of the transfer heads on the base portion is separated from the at least one recess, and the wall portion is fully filled in a volume enclosed by an extension of a projection of a side edge of the transfer head from the top surface to the base portion in a normal direction of the top surface.

### Claim 2 (depends on 1)

The transfer head array of claim 1, wherein a number of the at least one wall portion is plural.

### Claim 3 (depends on 1)

The transfer head array of claim 1, wherein the at least one recess has a uniform depth.

### Claim 4 (depends on 1)

The transfer head array of claim 1, wherein the at least one recess has a first portion and a second portion, and the first portion and the second portion have different depths.

### Claim 5 (depends on 1)

The transfer head array of claim 1, wherein a number of the at least one recess is plural, and at least two of the recesses are separated from each other by the at least one wall portion when viewed along a direction perpendicular to the top surface of the at least one wall portion.

### Claim 6 (depends on 5)

The transfer head array of claim 5, wherein said at least two of the recesses have substantially the same depth.

### Claim 7 (depends on 5)

The transfer head array of claim 5, wherein said at least two of the recesses have different depths.

### Claim 8 (depends on 1)

The transfer head array of claim 1, wherein the body has a picking up region, the transfer heads comprise a plurality of outermost transfer heads, the outermost transfer heads define a perimeter of the picking up region, and the at least one wall portion comprises at least a first wall portion extending from the perimeter of the picking up region.

### Claim 9 (depends on 8)

The transfer head array of claim 8, wherein the outermost transfer heads comprise at least a first outermost transfer head at a first edge of the perimeter and a second outermost transfer head at a second edge of the perimeter, and the first wall portion is continuous from the first edge to the second edge.

### Claim 10 (depends on 8)

The transfer head array of claim 8, wherein the at least one wall portion further comprises at least a second wall portion spaced apart from the perimeter of the picking up region.

### Claim 11 (depends on 1)

The transfer head array of claim 1, wherein the at least one wall portion is continuous at least among three of the transfer heads.

### Claim 12 (depends on 1)

The transfer head array of claim 1, wherein the at least one wall portion has a uniform thickness.

### Claim 13 (depends on 1)

The transfer head array of claim 1, wherein the at least one wall portion has a first portion and a second portion, and the first portion and the second portion have different thicknesses.

### Claim 14

A transfer head array, comprising:
a body comprising:
a base portion; and
at least one wall portion located on and stationary to the base portion, wherein the at least one wall portion has a top surface, and the at least one wall portion defines at least one recess in the body; and
a plurality of transfer heads located on the top surface of the at least one wall portion, the at least one wall portion being continuous at least between two of the transfer heads, wherein a vertical projection of each of the transfer heads on the base portion is separated from the at least one recess, and there is no void between the transfer head and the base portion.