# US 10,373,795 B2 · Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,373,795 B2
- Document ID: US10373795B2
- Status: Granted
- Kind: B2
- Application number: 15/849,389
- Filed: 2017-12-20
- Published: 2018-07-12
- Granted: 2019-08-06
- Earliest claimed: 2016-12-20
- Assignees: FEI Company
- Applicants: FEI Company
- Inventors: Yakov Bobrov; Cecelia Anne Campochiaro
- Web page: https://patentgrep.com/patent/US10373795B2

## CPC

- H01J 37/18: Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel}
- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 37/244: Detectors; Associated components or circuits therefor
- H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
- H01J 2237/0245: Moving whole optical system relatively to object
- H01J 2237/162: Open vessel, i.e. one end sealed by object or workpiece
- H01J 2237/2006: Vacuum seals
- H01J 2237/2448: Secondary particle detectors
- H01J 2237/24564: Measurements of electric or magnetic variables, e.g. voltage, current, frequency
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Provided are new techniques for fault analysis in IC semiconductor devices, including system designs and methods to enable the probing of circuitry within an IC device under test (DUT) using electron beam (e-beam) techniques while the DUT is being stimulated electrically, or while the device is active on its own or within a host system mounted in a circuit board or other module. The DUT could be a packaged IC, or an IC in some unpackaged form. To create a local evacuated volume immediately outside the e-beam tool, a sealing element is sealed against or around the DUT for a localized seal. Such an arrangement obviates the need for vacuum feedthroughs of possibly thousands of signals required to operate and monitor the DUT, and further enables probing of a DUT while it is operating in its normal environment, such as installed on a circuit board in its system, or on a tester.

## Claims

### Claim 1

A method of examining an integrated circuit (IC) using a scanning electron microscope (SEM) having an SEM column with an SEM column opening at one end from which an electron beam is emitted, the method comprising:
sealing the SEM column opening around a target area on a back side of the IC to create a sealed volume at the SEM column opening, the target area forming a part of an enclosure of the sealed volume;
evacuating the sealed volume;
applying a voltage to a circuit element of the IC, the voltage inducing an electrical potential in the target area; and
scanning the electron beam over the target area to detect the electrical potential at the surface of the target area.

### Claim 2 (depends on 1)

The method of claim 1 in which sealing the SEM column opening around the target area comprises sealing, using a sealing element, the SEM column opening against the IC from the back side or against an IC holder holding the IC.

### Claim 3 (depends on 2)

The method of claim 2 in which sealing the SEM column opening around the target area comprises causing relative motion between the SEM column and the IC to compress the sealing element against the IC or against the IC holder.

### Claim 4 (depends on 3)

The method of claim 3 in which causing relative motion between the SEM column and the IC comprises moving the SEM toward the IC.

### Claim 5 (depends on 1)

The method of claim 1, further comprising:
thinning the IC at least at the target area from the back side of the IC such that the distance of the circuit element in the target area closest to a surface of the thinned IC on the back side is less than 1 micron; and
placing the IC in a test fixture if the IC is not already mounted in a circuit module that serves as the test fixture.

### Claim 6 (depends on 1)

The method of claim 1 in which evacuating the sealed volume comprises evacuating a space between the IC and a pressure limiting aperture in the SEM column.

### Claim 7 (depends on 1)

The method of claim 1 in which evacuating the sealed volume comprises evacuating the sealed volume to a pressure of between 10 Pa and 25 kPa.

### Claim 8 (depends on 1)

The method of claim 1 further comprising detecting photons emitted from the IC within the sealed volume while scanning the SEM.

### Claim 9 (depends on 1)

The method of claim 1 in which the SEM column comprises an environmental SEM (ESEM) column or other low-vacuum SEM column.

### Claim 10 (depends on 1)

The method of claim 1 in which scanning the electron beam over the target area comprises scanning the electron beam over the target area with the IC mounted in an IC holder and further comprising examining the IC in the IC holder with a near-infra red microscope.

### Claim 11 (depends on 1)

The method of claim 1 in which scanning the electron beam over the target area to detect the electrical potential at the surface of the target area comprises detecting secondary electrons emitted from the target area in response to an incident electron beam.

### Claim 12 (depends on 11)

The method of claim 11 in which detecting secondary electrons emitted from the target area in response to the incident electron beam comprises forming a voltage contrast image of the target area.

### Claim 13 (depends on 1)

The method of claim 1 in which scanning the electron beam over the target area to detect the electrical potential at the surface of the target area comprises sensing a change in a signal from the IC through a test fixture connection as the electron beam scans the target area.

### Claim 14 (depends on 1)

The method of claim 1 in which scanning the electron beam over the target area comprises scanning the electron beam over the target area using the SEM column having a column adapter element mounted at the SEM column opening to narrow the SEM column opening to a diameter of less than 2 mm.

### Claim 15 (depends on 14)

The method of claim 14 in which sealing the SEM column opening around the target area on the back side of the IC comprises sealing the SEM column opening around the target area on the back side of the IC using a sealing element positioned on a distal side of the column adapter element.

### Claim 16

An apparatus for examining a target area on the back side of an IC comprising:
a test fixture including multiple electrical probes to connect to multiple contacts on the IC;
an SEM including an electron source, an SEM focusing column having a distal end from which an electron beam is emitted toward the target area, and an electron detector positioned to detect electrons emitted from the target area in response to the incident electron beam;
a sealing element adapted to be positioned at the distal end of the SEM focusing column and having a central opening to allow electrons to pass;
a moveable mount holding the SEM or the IC and configured to cause relative motion between the SEM and the IC to cause the sealing element to form a seal between the SEM focusing column and the IC or the test fixture, the seal around the target area; and
a vacuum pump coupled to the SEM focusing column and operable to create a partial vacuum between the IC and the distal end of the SEM focusing column.

### Claim 17 (depends on 16)

The apparatus of claim 16, further comprising a controller operatively connected to the SEM, and programmed to control the SEM to perform voltage contrast imaging on the target area.

### Claim 18 (depends on 16)

The apparatus of claim 16, in which the test fixture includes multiple electrical connections for coupling multiple high speed electrical signals to and from the IC, the electrical connections coupled to the IC outside of the partial vacuum.

### Claim 19 (depends on 16)

The apparatus of claim 16, further comprising a photon detector mounted to the SEM focusing column at a location such that, with the apparatus in an operational position, the photon detector is inside the partial vacuum.

### Claim 20 (depends on 16)

The apparatus of claim 16, further comprising at least one additional inspection tool held by the moveable mount, said moveable mount further adjustable to move a selected one of the at least one additional inspection tool relative to the IC to a third operating position to observe the IC, wherein the selected additional inspection tool is one of a near-infrared microscope, a laser-assisted device alteration (LADA) device, a visible light probe, a visible light microscope, or a photon emission microscope (PEM).

### Claim 21 (depends on 16)

The apparatus of claim 16, in which the sealing element is a deformable gasket and in which creating the seal includes moving the SEM focusing column toward the IC to compress the sealing element against the IC from a back side of the IC.