Back to results
US 10,373,793 B2Granted
Conductive contact point pin and charged particle beam apparatus
AssigneeNuFlare Technology, Inc.
InventorsMichihiro Kawaguchi, Kiminobu Akeno, Kenichi Kataoka, Tomoki Umetsu
Life of this patent
Estimating the term…
Abstract
A conductive contact point pin includes a pin body, and a plurality of convex portions formed in a tip portion of the pin body, wherein the conductive contact point pin breaks, by pressing a substrate where a film to be broken is formed on a conductive film from above the film to be broken, the film to be broken in order to be electrically connected to the conductive film.
Claims17
A conductive contact point pin comprising:
- a pin body;
- and
- a plurality of convex portions formed in a tip portion of the pin body, wherein
- the plurality of convex portions are configured to break a film formed on a conductive film so as to electrically connect the pin body with the conductive film by being pressed on a substrate where the film to be broken is formed on the conductive film from above the film to be broken,
- the film to be broken includes chromic oxide (CrO2),
- an interspace between adjacent convex portions of the plurality of convex portions is formed to be equal to or greater than 1.3 μm,
- a height dimension of the plurality of convex portions is larger than a film thickness of the film to be broken,
- the number of the plurality of convex portions is twenty-five or more,
- a tip top surface of each of the plurality of convex portions is a square, sides of which have a length in range of 0.2 μm to 0.5 μm, and
- the plurality of convex portions are chamfered so that the sides of the tip top surface of each of the plurality of convex portions has a radial dimension smaller than 0.05 μm.
7 more elements
A charged particle beam apparatus comprising:
- a stage configured to mount thereon a substrate where a film to be broken is formed on a conductive film;
- a conductive contact point pin including a pin body and a plurality of convex portions formed in a tip portion of the pin body, the plurality of convex portions configured to break the film to be broken so as to electrically connect the pin body with the conductive film by being pressed on the substrate from above the film to be broken;
- and
- an irradiation mechanism configured to irradiate the substrate with a charged particle beam, in a state where a ground potential is applied to the conductive film via the conductive contact point pin,
- wherein the film to be broken includes chromic oxide (CrO2),
- an interspace between adjacent convex portions of the plurality of convex portions is formed to be equal to or greater than 1.3 μm,
- a height dimension of the plurality of convex portions is larger than a film thickness of the film to be broken,
- the number of the plurality of convex portions is twenty-five or more,
- a tip top surface of each of the plurality of convex portions is a square, sides of which have a length in range of 0.2 μm to 0.5 μm, and
- the plurality of convex portions are chamfered so that the sides of the tip top surface of each of the plurality of convex portions has a radial dimension smaller than 0.05 μm.
7 more elements
Dependencies are inferred from the claim text.