# US 10,371,279 B2 · Actuator > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,371,279 B2 - Document ID: US10371279B2 - Status: Granted - Kind: B2 - Application number: 15/713,159 - Filed: 2017-09-22 - Published: 2018-01-11 - Granted: 2019-08-06 - Earliest claimed: 2015-03-31 - Assignees: Sumitomo Heavy Industries, Ltd. - Applicants: Sumitomo Heavy Industries, Ltd. - Inventors: Tatsuya Yoshida - Web page: https://patentgrep.com/patent/US10371279B2 ## CPC - F16K 31/12: actuated by fluid ({fluid-actuated lift valves F16K1/126} ; fluid-actuated check valves F16K15/00; fluid-actuated safety valves F16K17/00) - F15B 15/24: for restricting the stroke - F15B 21/044: Removal or measurement of undissolved gas, e.g. de-aeration, venting or bleeding - F16C 29/02: Sliding-contact bearings - F16C 29/025: {Hydrostatic or aerostatic (this type of bearing for rotary parts F16C32/06)} - F16C 32/06: with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings - F16C 32/0614: {the gas being supplied under pressure, e.g. aerostatic bearings} - F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)} - F15B: SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR - F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS ## Abstract An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section. ## Claims ### Claim 1 An actuator comprising: a guide that extends in one direction, at least one surface of the guide is open; and a slider that is movable in an axial direction with respect to the guide so as to be floated with respect to the guide and guided by the guide, the slider has an air servo chamber for driving the slider, wherein the slider has an air pad that is configured to eject compression gas, the slider has exhaust grooves that are configured to allow the compression gas ejected from the air pad to be discharged, and wherein a first one of the exhaust grooves surrounds the air pad, a second one of the exhaust grooves surrounds the first one of the exhaust grooves and a third one of the exhaust grooves surrounds the second one of the exhaust grooves. ### Claim 2 (depends on 1) The actuator according to claim 1, wherein the guide has a recessed cross-section, and the slider is configured to be floated with respect to the guide and guided by the guide while being restrained by three surfaces that constitute the recessed cross-section. ### Claim 3 (depends on 1) The actuator according to claim 1, wherein the guide has a polygonal cross-section, and the slider is configured to be floated with respect to the guide and guided by the guide while being restrained by one surface of a plurality of surfaces that constitute the polygonal cross-section. ### Claim 4 (depends on 1) The actuator according to claim 1, wherein a magnet preloading mechanism that applies a downward force resulting from magnetism to the slider is provided between the slider and the guide. ### Claim 5 (depends on 1) The actuator according to claim 1, wherein each of the exhaust grooves includes a portion that extends in the axial direction. ### Claim 6 (depends on 5) The actuator according to claim 5, wherein the guide has a recessed cross-section, and the slider is configured to be floated with respect to the guide and guided by the guide while being restrained by three surfaces that constitute the recessed cross-section. ### Claim 7 (depends on 5) The actuator according to claim 5, wherein the guide has a polygonal cross-section, and the slider is configured to be floated with respect to the guide and guided by the guide while being restrained by one surface of a plurality of surfaces that constitute the polygonal cross-section. ### Claim 8 (depends on 5) The actuator according to claim 5, wherein a magnet preloading mechanism that applies a downward force resulting from magnetism to the slider is provided between the slider and the guide. ### Claim 9 (depends on 1) The actuator according to claim 1, wherein either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces that constitute the recessed cross-section. ### Claim 10 (depends on 9) The actuator according to claim 9, wherein the slider has an air pad that ejects compression gas, and is configured to be floated with respect to the guide and guided by the guide. ### Claim 11 (depends on 9) The actuator according to claim 9, wherein the slider has an air servo chamber that extends in the axial direction, wherein the guide has a partition wall that enters the air servo chamber to partition the air servo chamber into two, and wherein the slider supplies the compression gas to one partition of the two partitions of the air servo chamber and discharges the compression gas from the other partition, thereby moving in the axial direction with respect to the guide. ### Claim 12 (depends on 9) The actuator according to claim 9, wherein a magnet preloading mechanism that applies a downward force resulting from magnetism to the slider is provided between the slider and the guide.