# US 10,370,764 B2 · Isolator for a substrate processing chamber > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,370,764 B2 - Document ID: US10370764B2 - Status: Granted - Kind: B2 - Application number: 14/522,196 - Filed: 2014-10-23 - Published: 2015-05-07 - Granted: 2019-08-06 - Earliest claimed: 2013-11-06 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Ramprakash Sankarakrishnan - Web page: https://patentgrep.com/patent/US10370764B2 ## CPC - C23C 16/513: using plasma jets - C23C 16/509: using internal electrodes - H01J 37/32091: {the radio frequency energy being capacitively coupled to the plasma} - H01J 37/32467: {Material} - H01J 37/32477: {characterised by the means for protecting vessels or internal parts, e.g. coatings} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A processing kit for a plasma processing chamber. The processing kit includes a plurality of ceramic arc-shaped pieces. Each arc-shaped piece has a concave first end and a convex second end and the first end of each arc-shaped piece is configured to mate with an adjacent end of a neighboring arc-shaped piece to form a ring shaped inner isolator. ## Claims ### Claim 1 A processing kit for a plasma processing chamber, comprising: a plurality of ceramic arc-shaped pieces, each arc-shaped piece having a concave first end and a convex second end, the first end of each arc-shaped piece configured to mate with an adjacent end of a neighboring arc-shaped piece with a gap between the first end of the arc-shaped piece and the adjacent end of the neighboring arc-shaped piece to form a ring shaped inner isolator, wherein the concave first end and the convex second end are configured to prevent line-of-sight across the gap. ### Claim 2 (depends on 1) The processing kit of claim 1, wherein three ceramic arc-shaped pieces are configurable to form a ring. ### Claim 3 (depends on 1) The processing kit of claim 1, wherein each ceramic arc-shaped piece has an inner wall having a radius of about 7.499 inches to about 7.501 inches. ### Claim 4 (depends on 1) The processing kit of claim 1, wherein each ceramic arc-shaped piece has an outer wall having a radius of about 8.599 inches to about 8.601 inches. ### Claim 5 (depends on 1) The processing kit of claim 1, wherein each ceramic arc-shaped piece has a thickness of about 0.397 inches to about 0.403 inches. ### Claim 6 (depends on 1) The processing kit of claim 1, wherein the concave first end of each ceramic arc-shaped piece has a radius of about 0.550 inches. ### Claim 7 (depends on 1) The processing kit of claim 1, wherein the convex second end of each ceramic arc-shaped piece has a radius of about 0.550 inches. ### Claim 8 (depends on 1) The processing kit of claim 1, wherein each ceramic arc-shaped piece is fabricated from at least one of yttria (Y2O3), aluminum nitride (AlN), and alumina (Al2O3). ### Claim 9 (depends on 1) The processing kit of claim 1, wherein each ceramic arc-shaped piece is fabricated from at least 99% alumina (Al2O3) by weight. ### Claim 10 A processing kit for a plasma processing chamber, comprising: a plurality of ceramic arc-shaped pieces, each arc-shaped piece having a concave first end and a convex second end, the first end of each arc-shaped piece configured to mate with an adjacent end of a neighboring arc-shaped piece with a gap between the first end of each arc-shaped piece and the adjacent end of each neighboring arc-shaped piece to form a ring shaped inner isolator, wherein the concave first end and the convex second end are configured to prevent line-of-sight across the gap; and a single piece ring shaped outer isolator that circumscribes the ring shaped inner isolator. ### Claim 11 (depends on 10) The processing kit of claim 10, wherein the outer isolator has a thickness that is the same as a thickness of the ring shaped inner isolator. ### Claim 12 A processing kit for a plasma processing chamber, comprising: a plurality of ceramic arc-shaped pieces, each arc-shaped piece having a concave first end and a convex second end, the first end of each arc-shaped piece configured to mate with an adjacent end of a neighboring arc-shaped piece to form a ring shaped inner isolator when inner walls of the arc-shaped pieces are on a common diameter, the first end of each arc-shaped piece having gaps defined between adjacent ends are configured that prevent line-of-sight between the inner wall and an outer wall when the outer and inner walls of the arc-shaped pieces are on a common diameter, wherein each ceramic arc-shaped piece comprises: an inner wall having a radius of about 7.499 inches to about 7.501 inches; an outer wall having a radius of about 8.599 inches to about 8.601 inches; and a thickness of about 0.397 inches to about 0.403 inches. ### Claim 13 (depends on 12) The processing kit of claim 12, wherein the concave first end of each ceramic arc-shaped piece has a radius of about 0.55 inches and wherein the convex second end of each ceramic arc-shaped piece has a radius of about 0.55 inches. ### Claim 14 (depends on 12) The processing kit of claim 12, wherein the ceramic arc-shaped piece is fabricated from at least one of yttria (Y2O3), aluminum nitride (AlN), and alumina (Al2O3). ### Claim 15 (depends on 12) The processing kit of claim 12, wherein three ceramic arc-shaped pieces are configurable to form a ring. ### Claim 16 (depends on 12) The processing kit of claim 12 further comprising: a single piece ring shaped outer isolator that circumscribes the ring shaped inner isolator. ### Claim 17 (depends on 16) The processing kit of claim 16, wherein the outer isolator further comprises a thickness that is the same as a thickness of the ring shaped inner isolator.