# US 10,370,170 B1 · Clean storage packaging article and method for making and using

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- Number: US 10,370,170 B1
- Document ID: US10370170B1
- Status: Granted
- Kind: B1
- Application number: 15/245,395
- Filed: 2016-08-24
- Granted: 2019-08-06
- Earliest claimed: 2012-09-28
- Assignees: Air Liquide Electronics U.S. LP
- Applicants: Air Liquide Electronics U.S. LP
- Inventors: Fuhe Li; James Scott Anderson
- Web page: https://patentgrep.com/patent/US10370170B1

## CPC

- B65D 81/18: providing specific environment for contents, e.g. temperature above or below ambient (with thermal insulation B65D81/38)
- B32B 1/00: Layered products having a non-planar shape
- B32B 27/08: of synthetic resin
- B32B 27/304: {comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF}
- B32B 27/322: {comprising halogenated polyolefins, e.g. PTFE}
- B65B 55/24: Cleaning of, or removing dust from, containers, wrappers, or packaging {; Preventing of fouling}
- B65D 25/205: {Means for the attachment of labels, cards, coupons or the like; (cards or coupons for the other types of rigid or semi-rigid containers B65D25/36 takes precedence)}
- B65D 85/38: for delicate optical, measuring, calculating or control apparatus
- C08F 114/22: Vinylidene fluoride
- H10P 72/1908: {specially adapted for containing substrates other than wafers}
- H10P 72/1911: {characterised by materials, roughness, coatings or the like}
- B32B 2307/31: Heat sealable
- B32B 2307/41: Opaque
- B32B 2307/414: Translucent
- B32B 2307/546: Flexural strength; Flexion stiffness
- B32B 2307/714: Inert, i.e. inert to chemical degradation, corrosion
- B32B 2439/46: Bags
- B32B 2553/00: Packaging equipment or accessories not otherwise provided for
- B65D: CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B65B: MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING (bundling and pressing devices for cigars A24C1/44; devices for tensioning and securing binders adapted to be supported by the article or articles to be bound B25B25/00; applying closure members to bottles, jars or similar containers B67B1/00-B67B6/00; concurrent cleaning, filling and closing of bottles B67C7/00; emptying bottles, jars, cans, casks, barrels or similar containers B67C9/00)
- C08F: MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A packing article for the storage and/or transport of items and materials requiring high levels of cleanliness is described. Methods of making and using the packaging article are also described. The packaging article may be used to store or transport, for example, advanced optical components, or materials and components used in the manufacturing of microelectronic devices or optical components. A method of making the packaging article includes contacting the packaging article with organic solvent(s) and acidic solution(s) and rinsing with ultrapure water. Interior cleanliness levels for various contaminants, such as, metals, anionic materials, organic compounds, and particles may be verified and the packaging articles may be labeled and sorted according to cleanliness level.

## Claims

### Claim 1

A packaging article for storage of clean items, comprising:
a body made of a material comprising a fluoropolymer, the body forming an enclosure sized to accommodate a clean item and having at least one opening to the enclosure, the opening adapted to receive the clean item therethrough; and
an interior surface of the body, the interior surface having:
less than 1×1010 atoms/cm2 of each of the following metals: aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
less than 1×1010 ions/cm2 for each of the following anions: fluoride, chloride, nitrite, sulfate, and phosphate; and
less than 2 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms,
the packaging article produced by placing the packaging article in contact with a solution comprising an organic solvent, rinsing the packaging article with ultrapure water; placing the packaging article in contact with an acid solution, rinsing the packaging article with ultrapure water; and drying the packaging article.

### Claim 2 (depends on 1)

The packaging article of claim 1, wherein the interior surface of the packaging article further has:
less than 1 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, compounds with greater than 20 carbon atoms;
less than 1 particle/cm2 for particles greater than 5 micron in size;
less than 10 particles/cm2 for particles 1 micron to 5 micron in size; and
less than 100 particles/cm2 for particles 0.5 micron to 1 micron in size.

### Claim 3 (depends on 2)

The packaging article of claim 2, wherein the fluoropolymer material is selected from the group consisting of perfluoroalkoxy (PFA), polytetrafluoroethylene (PTFE), fluorinated ethylene propylene (FEP), perfluoropolyether (PFPE), and polyvinylidene fluoride (PVDF).

### Claim 4 (depends on 3)

The packaging article of claim 3, wherein the fluoropolymer material is polyvinylidene fluoride (PVDF).

### Claim 5 (depends on 1)

The packaging article of claim 1, further comprising a label disposed on an outer surface of the body, the label listing cleanliness levels.

### Claim 6 (depends on 1)

The packaging article of claim 1, wherein the clean item is an optical component.

### Claim 7

A packaging article for storage of clean items having an interior surface having:
less than 1×1010 atoms/cm2 of each of the following metals: aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
less than 1×1010 ions/cm2 for each of the following anions: fluoride, chloride, nitrite, sulfate, and phosphate; and
less than 2 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms,
the packaging article being produced by placing the packaging article in contact with a solution comprising an organic solvent, rinsing the packaging article with ultrapure water; placing the packaging article in contact with an acid solution, rinsing the packaging article with ultrapure water; and drying the packaging article.

### Claim 8 (depends on 7)

The packaging article of claim 7, wherein the packaging article further has:
less than 1 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, compounds with greater than 20 carbon atoms;
less than 1 particle/cm2 for particles greater than 5 micron in size;
less than 10 particles/cm2 for particles 1 micron to 5 micron in size; and
less than 100 particles/cm2 for particles 0.5 micron to 1 micron in size.

### Claim 9 (depends on 7)

The packaging article of claim 7, wherein the packaging article is selected from the group consisting of perfluoroalkoxy (PFA), polytetrafluoroethylene (PTFE), fluorinated ethylene propylene (FEP), perfluoropolyether (PFPE), and polyvinylidene fluoride (PVDF).

### Claim 10 (depends on 9)

The packaging article of claim 9, wherein the packaging article is polyvinylidene fluoride (PVDF).

### Claim 11 (depends on 1)

The packaging article of claim 1, further comprising a label disposed thereon, the label listing cleanliness levels.

### Claim 12 (depends on 1)

The packaging article of claim 1, wherein the clean item is an optical component.

### Claim 13 (depends on 1)

The packaging article of claim 1, wherein the packaging article for storage of clean items is an inner packaging bag.

### Claim 14 (depends on 13)

The inner packaging bag of claim 13 having a silicon wafer disposed therein.

### Claim 15 (depends on 14)

The inner packaging bag of claim 14 in which an opening in the inner packaging bag has been sealed shut.

### Claim 16 (depends on 15)

The inner packaging bag of claim 15 further disposed within an outer container.