# US 10,369,675 B2 · CMP apparatus having polishing pad surface property measuring device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,369,675 B2 - Document ID: US10369675B2 - Status: Granted - Kind: B2 - Application number: 15/541,456 - Filed: 2016-01-07 - Published: 2018-01-18 - Granted: 2019-08-06 - Earliest claimed: 2015-01-07 - Assignees: Ebara Corporation - Applicants: Ebara Corporation - Inventors: Hisanori Matsuo - Web page: https://patentgrep.com/patent/US10369675B2 ## CPC - B24B 37/005: Control means for lapping machines or devices - B24B 37/00: Lapping machines or devices; Accessories (B24B3/00 takes precedence) - B24B 37/04: designed for working plane surfaces - B24B 49/12: involving optical means - B24B 49/18: taking regard of the presence of dressing tools - B24B 53/00: Devices or means for dressing or conditioning abrasive surfaces (compensation for grinding wheel abrasion resulting from dressing B24B47/25) - B24B 53/017: Devices or means for dressing, cleaning or otherwise conditioning lapping tools - B24B 53/02: of plane surfaces on abrasive tools (B24B53/017 takes precedence) - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ## Abstract The present invention relates to a CMP apparatus having a polishing pad surface property measuring device for measuring surface properties such as surface topography or surface condition of a polishing pad used for polishing a substrate such as a semiconductor wafer. The CMP apparatus includes a polishing pad surface property measuring device (30) configured to apply a laser beam to a surface of a polishing pad (2) and to receive reflected light from the polishing pad to obtain reflection intensity in each reflection angle, a processor (40) configured to perform a Fourier transform on a reflection intensity distribution obtained by the measuring device to obtain a spatial wavelength spectrum of the surface of the polishing pad and to obtain surface properties of the polishing pad by numerical analysis, a dressing control unit (23) configured to determine dressing conditions of the polishing pad (2) by a closed loop control based on the surface properties of the polishing pad obtained by the processor, and a dressing apparatus (20) configured to dress the polishing pad based on the dressing conditions determined by the dressing control unit. ## Claims ### Claim 1 A CMP apparatus comprising: a polishing pad surface property measuring device configured to apply a laser beam to a surface of a polishing pad and to receive reflected light from the polishing pad to obtain at least one reflection intensity at a reflection angle; a processor configured to perform a Fourier transform on a reflection intensity distribution obtained by the polishing pad surface property measuring device to obtain a spatial wavelength spectrum of the surface of the polishing pad, and to perform numerical analysis on the spatial wavelength spectrum to obtain surface properties of the polishing pad; a dressing control unit configured to determine dressing conditions of the polishing pad by a closed loop control based on the surface properties of the polishing pad; and a dressing apparatus configured to dress the polishing pad based on the dressing conditions determined by the dressing control unit; wherein the polishing pad surface property measuring device comprises a laser light source, a light emitter and a light receiver; and wherein the polishing pad surface property measuring device further comprises at least one of a mirror, an ND filter, a polarizer, a bandpass filter which allows transmission of only light within ±5 nm with respect to a wavelength of the laser beam emitted from the laser light source, and an optical fiber. ### Claim 2 (depends on 1) The CMP apparatus according to claim 1, wherein the determination of the dressing conditions comprises: obtaining a difference between a measured surface property value of the pad and a preset desired surface property value of the pad, as a desired surface property variation of the pad; and assigning the desired surface property variation of the pad to a regression equation prepared by obtaining in advance a relationship between a variation of at least one of a dressing load, a dresser rotational speed, a polishing pad rotational speed, and a dresser swinging speed and a surface property variation of the pad to determine at least one of the dressing load, the dresser rotational speed, the polishing pad rotational speed, and the dresser swinging speed. ### Claim 3 (depends on 1) The CMP apparatus according to claim 1, wherein a plurality of reflection intensities obtained at a plurality of reflection angles comprises the at least one reflection intensity, and wherein the numerical analysis for obtaining the surface properties of the polishing pad performed by the processor comprises dividing a sum of the plurality of reflection intensities, wherein the reflection intensity comprises a predetermined spatial wavelength range, by a sum of the plurality of reflection intensities, wherein the reflection intensity comprises a wider spatial wavelength range. ### Claim 4 (depends on 1) The CMP apparatus according to claim 1, wherein the light receiver comprises a linear or planar CCD element or CMOS element having a size capable of receiving fourth-order diffracted light at the highest or seventh-order diffracted light at the highest of the laser beam reflected from the polishing pad. ### Claim 5 (depends on 1) The CMP apparatus according to claim 1, wherein the laser beam applied to the surface of the polishing pad is s-polarized. ### Claim 6 (depends on 1) The CMP apparatus according to claim 1, wherein the dressing control unit is configured to adjust at least one of a dressing load, a polishing pad rotational speed, a dresser rotational speed, and a dresser swinging speed. ### Claim 7 (depends on 1) The CMP apparatus according to claim 1, wherein irradiation of the laser beam is performed by swinging the laser light source to adjust an incident angle of the laser beam to the surface of the polishing pad. ### Claim 8 A CMP apparatus comprising: a polishing pad surface property measuring device configured to apply a laser beam to a surface of a polishing pad and to receive reflected light from the polishing pad to obtain reflection intensity in a reflection angle; a processor configured to perform a Fourier transform on a reflection intensity distribution obtained by the polishing pad surface property measuring device to obtain a spatial wavelength spectrum of the surface of the polishing pad, and to perform numerical analysis on the spatial wavelength spectrum to obtain surface properties of the polishing pad; and an abnormality judgement unit configured to judge an abnormality of the surface properties of the polishing pad when a surface property value of the polishing pad obtained by the processor is compared with a preset range of the surface property value of the pad and falls outside the preset range; wherein the polishing pad surface property measuring device comprises a laser light source, a light emitter and a light receiver; and wherein the polishing pad surface property measuring device further comprises at least one of a mirror, an ND filter, a polarizer, a bandpass filter which allows transmission of only light within ±5 nm with respect to a wavelength of the laser beam emitted from the laser light source, and an optical fiber. ### Claim 9 (depends on 8) The CMP apparatus according to claim 8, wherein when the abnormality is judged by the abnormality judgement unit, a display unit issues an alarm of the abnormality. ### Claim 10 A CMP apparatus comprising: a polishing pad surface property measuring device configured to apply a laser beam to a surface of a polishing pad and to receive reflected light from the polishing pad to obtain at least one reflection intensity at a reflection angle; a processor configured to perform a Fourier transform on a reflection intensity distribution obtained by the polishing pad surface property measuring device to obtain a spatial wavelength spectrum of the surface of the polishing pad, and to perform numerical analysis on the spatial wavelength spectrum to obtain surface properties of the polishing pad; and a display unit configured to display at least one of a state of a dresser and a state of the polishing pad based on a result of comparison between the surface properties of the polishing pad and a preset surface property value of the pad; wherein the polishing pad surface property measuring device comprises a laser light source, a light emitter and a light receiver; and wherein the polishing pad surface property measuring device further comprises at least one of a mirror, an ND filter, a polarizer, a bandpass filter which allows transmission of only light within ±5 nm with respect to a wavelength of the laser beam emitted from the laser light source, and an optical fiber. ### Claim 11 (depends on 10) The CMP apparatus according to claim 10, wherein the state of the dresser is one of an alarm representing life of the dresser and a poor performance state of the dresser. ### Claim 12 (depends on 10) The CMP apparatus according to claim 10, wherein the state of the polishing pad is presence or absence of an abnormality of the surface properties of the polishing pad. ### Claim 13 A CMP apparatus comprising: a polishing pad surface property measuring device configured to apply a laser beam to a surface of a polishing pad and to receive reflected light from the polishing pad to obtain reflection intensity in a reflection angle; a processor configured to perform a Fourier transform on a reflection intensity distribution obtained by the polishing pad surface property measuring device to obtain a spatial wavelength spectrum of the surface of the polishing pad, and to perform numerical analysis on the spatial wavelength spectrum to obtain surface properties of the polishing pad; and a display unit configured to display at least one of a state of a dresser and a state of the polishing pad based on the surface properties of the polishing pad; wherein the polishing pad surface property measuring device comprises a laser light source, a light emitter and a light receiver; and wherein the polishing pad surface property measuring device further comprises at least one of a mirror, an ND filter, a polarizer, a bandpass filter which allows transmission of only light within ±5 nm with respect to a wavelength of the laser beam emitted from the laser light source, and an optical fiber. ### Claim 14 (depends on 13) The CMP apparatus according to claim 13, wherein the state of the dresser is dressing capability of the dresser. ### Claim 15 (depends on 13) The CMP apparatus according to claim 13, wherein the state of the polishing pad is a surface property value of the polishing pad. ### Claim 16 (depends on 1) A computer-readable recording medium which records a program for causing a CMP apparatus according to claim 1 to perform predetermined operations, the recording medium which records the program causing a computer to perform: a step for applying a laser beam to a surface of a polishing pad; a step for receiving reflected light from the polishing pad; a step for retrieving information of the received light; a step for obtaining reflection intensity in each reflection angle obtained from the retrieved information; a step for creating a reflection intensity distribution by performing the step for applying the laser beam, the step for receiving the light, the step for retrieving the information and the step for obtaining the reflection intensity for a predetermined time; or a step for creating a reflection intensity distribution by repeating the step for applying the laser beam, the step for receiving the light, the step for retrieving the information and the step for obtaining the reflection intensity a predetermined number of times; a step for obtaining a spatial wavelength spectrum of the surface of the polishing pad by performing a Fourier transform on the reflection intensity distribution; a step for performing numerical analysis from the spatial wavelength spectrum; and a step for obtaining surface properties of the polishing pad from the numerical analysis. ### Claim 17 (depends on 16) The computer-readable recording medium according to claim 16, wherein the recording medium records the program causing the computer to perform further: a step for comparing a surface property value obtained from the numerical analysis and a preset surface property value of the pad; and a step for displaying at least one of a state of a dresser or a state of the polishing pad obtained from the step for comparing. ### Claim 18 (depends on 16) The computer-readable recording medium according to claim 16, wherein the recording medium records the program causing the computer to perform further: a step for determining dressing conditions of the polishing pad by a closed loop control based on the obtained surface property value. ### Claim 19 (depends on 18) The computer-readable recording medium according to claim 18, wherein the step for determining the dressing conditions comprises: a step for obtaining a difference between a surface property value obtained from the numerical analysis and a preset desired surface property value of the pad, as a desired surface property variation of the pad; a step for assigning the desired surface property variation of the pad to a predetermined regression equation which has been obtained and stored in advance; and a step for selecting optimum dressing conditions from a result obtained by the step for assigning the desired surface property variation of the pad to the predetermined regression equation. ### Claim 20 (depends on 16) The computer-readable recording medium according to claim 16, wherein the recording medium records the program causing the computer to perform further: a step for adjusting an incident angle of the laser beam to the polishing pad before the step for applying the laser beam.