# US 10,369,596 B2 · Vibrator unit and target supply device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,369,596 B2 - Document ID: US10369596B2 - Status: Granted - Kind: B2 - Application number: 15/480,398 - Filed: 2017-04-06 - Published: 2017-07-27 - Granted: 2019-08-06 - Earliest claimed: 2014-11-26 - Assignees: Gigaphoton Inc. - Applicants: Gigaphoton Inc. - Inventors: Toshiyuki Hirashita - Web page: https://patentgrep.com/patent/US10369596B2 ## CPC - B06B 1/0644: {using a single piezoelectric element (B06B1/0688 takes precedence)} - B05B 17/0669: {Excitation frequencies} - B05B 17/0676: {Feeding means} - G03F 7/70033: {by plasma extreme ultraviolet [EUV] sources} - H05G 2/0023: {Constructional details of the ejection system} - H10P 76/00: Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography - B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R) - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A vibrator unit may be configured to vibrate a target material in a target channel and include a vibration element configured to vibrate in response to an external electrical signal having a predetermined frequency. A resonance frequency of the vibration element may be different from the predetermined frequency of the electrical signal. A vibrator unit may include a vibration transmission member in contact with the first member including the target channel in interior; and a vibration element that is in contact with the vibration transmission member. A mode-1 natural frequency of the vibration transmission member may be different from a resonance frequency of the vibration element. ## Claims ### Claim 1 A vibrator configured to vibrate a target material in a target channel, comprising: a vibration element configured to vibrate in response to an external electrical signal having a predetermined frequency, a resonance frequency of the vibration element being different from the predetermined frequency of the electrical signal; a vibration transmission member configured to be in contact with the vibration element and a first member including the target channel in the interior and transfer vibration of the vibration element to the first member; a second elastic section configured to apply pressure pushing the vibration element against the vibration transmission member; and a second adjuster configured to adjust the pressure from the second elastic section to the vibration element. ### Claim 2 (depends on 1) The vibrator unit according to claim 1, wherein the resonance frequency of the vibration element is higher than the predetermined frequency. ### Claim 3 (depends on 1) The vibrator unit according to claim 1, wherein the vibration element includes one of a composite piezoelectric element and a bulk piezoelectric element. ### Claim 4 (depends on 1) The vibrator unit according to claim 1, further comprising: a frame member; a first elastic section configured to apply pressure pushing the frame member against the vibration transmission member; and a first adjuster configured to adjust pressure from the first elastic section to the frame member and fix the frame member and the vibration transmission member to the first member. ### Claim 5 (depends on 4) The vibrator unit according to claim 4, wherein the vibration transmission member includes a vibrator pin in contact with the first member, a recess formed such that a portion of the first member in contact with the vibration element is close to the target channel is provided in the portion, and at least a tip of the vibrator pin is disposed in the recess. ### Claim 6 (depends on 5) The vibrator unit according to claim 5, wherein the vibration transmission member has a refrigerant path through which a refrigerant flows. ### Claim 7 A vibrator unit configured to vibrate a target material in a target channel, comprising: a vibration element configured to vibrate in response to an external electrical signal having a predetermined frequency, a resonance frequency of the vibration element being different from the predetermined frequency of the electrical signal; and a vibration transmission member configured to be in contact with a first member including the target channel in the interior, wherein the vibration element is configured to be in contact with the vibration transmission member, and a mode-1 natural frequency of the vibration transmission member is different from the resonance frequency of the vibration element. ### Claim 8 (depends on 7) The vibrator unit according to claim 7, wherein the mode-1 natural frequency of the vibration transmission member is lower than the resonance frequency. ### Claim 9 (depends on 7) The vibrator unit according to claim 7, wherein the resonance frequency of the vibration element is higher than the predetermined frequency. ### Claim 10 (depends on 7) The vibrator unit according to claim 7, wherein the mode-1 natural frequency of the vibration transmission member is half the predetermined frequency of the electrical signal or less. ### Claim 11 (depends on 7) The vibrator unit according to claim 7, wherein the vibration element includes one of a composite piezoelectric element and a bulk piezoelectric element. ### Claim 12 (depends on 7) The vibrator unit according to claim 7, wherein an outer edge of a surface of the vibration transmission member in contact with the vibration element is a predetermined distance away from an outer edge of a surface of the vibration element in contact with the vibration transmission member. ### Claim 13 (depends on 7) The vibrator unit according to claim 7, further comprising an electrode configured to be in contact with the vibration element such that the electrode and the vibration transmission member pinch the vibration element, wherein an outer edge of a surface of the electrode in contact with the vibration element is a predetermined distance away from an outer edge of a surface of the vibration element in contact with the electrode. ### Claim 14 (depends on 13) The vibrator unit according to claim 13, wherein the vibration transmission member is grounded. ### Claim 15 (depends on 7) A target supply device that ejects a target material, comprising: a first member including a target channel in the interior; and the vibrator unit according to claim 7, wherein the resonance frequency of the vibration element is higher than the predetermined frequency of the electrical signal, and the mode-1 natural frequency of the vibration transmission member is half the predetermined frequency or lower. ### Claim 16 (depends on 15) The target supply device according to claim 15, further comprising: a second elastic section configured to apply pressure pushing the vibration element against the vibration transmission member; a second adjuster configured to adjust pressure from the second elastic section to the vibration element. ### Claim 17 (depends on 16) The target supply device according to claim 16, further comprising: a frame member; a first elastic section configured to apply pressure pushing the frame member against the vibration transmission member; and a first adjuster configured to adjust pressure from the first elastic section to the frame member and fix the frame member and the vibration transmission member to the first member. ### Claim 18 (depends on 17) The target supply device according to claim 17, wherein the vibration transmission member includes a vibrator pin in contact with the first member, a recess formed such that a portion of the first member in contact with the vibration element is close to the target channel is provided in the portion, and at least a tip of the vibrator pin is disposed in the recess. ### Claim 19 (depends on 18) The target supply device according to claim 18, wherein the vibration transmission member has a refrigerant path through which a refrigerant flows. ### Claim 20 (depends on 7) The vibrator unit according to claim 7, wherein the resonance frequency of the vibration element is higher than the predetermined frequency. ### Claim 21 (depends on 7) The vibrator unit according to claim 7, wherein the vibration element includes one of a composite piezoelectric element and a bulk piezoelectric element.