# US 10,369,510 B2 · Ozone abatement system for semiconductor manufacturing system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,369,510 B2 - Document ID: US10369510B2 - Status: Granted - Kind: B2 - Application number: 15/216,063 - Filed: 2016-07-21 - Published: 2016-11-10 - Granted: 2019-08-06 - Earliest claimed: 2014-01-14 - Assignees: International Business Machines Corporation - Applicants: International Business Machines Corporation - Inventors: Edward L. Pepe - Web page: https://patentgrep.com/patent/US10369510B2 ## CPC - B01D 53/007: {by irradiation} - B01D 53/66: Ozone - F23G 7/068: {using regenerative heat recovery means} - B01D 2258/0216: from CVD treatment or semi-conductor manufacturing - B01D 2259/804: UV light - Y02A 50/20: Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters - Y10T 137/206: Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system] - B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28) - F23G: CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION - Y02A: TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O3) to oxygen (O2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO. ## Claims ### Claim 1 An apparatus comprising: a first ozone abatement chamber comprising inner surfaces coated with a reflective material and a first series of laminar flow plates to ensure laminar flow through the first ozone abatement chamber; a second ozone abatement chamber connected in series with the first ozone abatement chamber, the second ozone abatement chamber comprising inner surfaces coated with the reflective material and a second series of laminar flow plates to ensure laminar flow through the second ozone abatement chamber; an inlet connected to the first ozone abatement chamber and adapted to accept exhaust air from an exhaust duct; a third series of laminar flow plates positioned between the first ozone abatement chamber and the second ozone abatement chamber to maintain laminar flow of the exhaust air between the first ozone abatement chamber and the second ozone abatement chamber; a fourth series of laminar flow plates positioned between the inlet and the first ozone abatement chamber to further ensure laminar flow of the exhaust air as it enters the first ozone abatement chamber; and an air port connected to the exhaust duct for adding bleed air to dilute the exhaust air, wherein at least the first series of laminar flow plates and the second series of laminar flow plates are coated with the reflective material, wherein the first, the second, the third and the fourth series of laminar flow plates are all positioned perpendicular to a flow direction of the exhaust air. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the first series of laminar flow plates, the second series of laminar flow plates, the third series of laminar flow plates, and the fourth series of laminar flow plates are perforated with a plurality of equidistant holes. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein each of the first ozone abatement chamber and the second ozone abatement chamber further comprise one or more UV lamps outside the flow of the exhaust air, wherein the one or more UV lamps produce at least 400 watts of UV light per ozone abatement chamber. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the first series of laminar flow plates, the second series of laminar flow plates, the third series of laminar flow plates, and the fourth series of laminar flow plates are each at least 0.625 inches thick with a plurality of equidistant holes. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the reflective material is polytetrafluoroethylene. ### Claim 6 (depends on 1) The apparatus of claim 1, further comprising: a plurality of dampers to direct the flow of the exhaust air through, only the first ozone abatement chamber and not the second ozone abatement chamber, through only the second ozone abatement chamber and not the first ozone abatement chamber, or through both the first ozone abatement chamber and the second ozone abatement chamber. ### Claim 7 An apparatus comprising: a first ozone abatement chamber comprising a first central chamber through which exhaust air passes and one or more UV lamps housed in one or more doors, inner surfaces of both the first central chamber and the one or more doors are coated with a reflective material, the one or more doors are situated exterior to the first central chamber and outside a flow path of the exhaust air through the first central chamber, the first central chamber comprising a first series of laminar flow plates to ensure laminar flow through the first central chamber; a second ozone abatement chamber comprising a second central chamber through which the exhaust air passes and one or more UV lamps housed in one or more doors, inner surfaces of both the second central chamber and the one or more doors are coated with the reflective material, the one or more doors are situated exterior to the second central chamber and outside the flow path of the exhaust air through the second central chamber, the second central chamber comprising a second series of laminar flow plates to ensure laminar flow through the second central chamber, wherein at least the first series of laminar flow plates and the second series of laminar flow plates are coated with the reflective material; an inlet connected to the first ozone abatement chamber and adapted to accept the exhaust air from an exhaust duct; a third series of laminar flow plates positioned between the first ozone abatement chamber and the second ozone abatement chamber to maintain laminar flow of the exhaust air between the first ozone abatement chamber and the second ozone abatement chamber; and a fourth series of laminar flow plates positioned between the inlet and the first ozone abatement chamber to further ensure laminar flow of the exhaust air as it enters the first ozone abatement chamber; and an air port connected to the exhaust duct for adding bleed air to dilute the exhaust air, wherein the first series of laminar flow plates, the second series of laminar flow plates, the third series of laminar flow plates and the fourth series of laminar flow plates are all positioned perpendicular to a flow direction of the exhaust air. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the first series of laminar flow plates, the second series of laminar flow plates, the third series of laminar flow plates, and the fourth series of laminar flow plates are at least 0.625 inches thick and are perforated with a plurality of equidistant holes. ### Claim 9 (depends on 7) The apparatus of claim 7, wherein the one or more UV lamps produce at least 400 watts of UV light per ozone abatement chamber. ### Claim 10 (depends on 7) The apparatus of claim 7, wherein the reflective material is polytetrafluoroethylene. ### Claim 11 (depends on 7) The apparatus of claim 7, further comprising: a plurality of dampers to direct the flow of the exhaust air through, only the first ozone abatement chamber and not the second ozone abatement chamber, through only the second ozone abatement chamber and not the first ozone abatement chamber, or through both the first ozone abatement chamber and the second ozone abatement chamber. ### Claim 12 (depends on 7) The apparatus of claim 7, further comprising: a regenerative thermal oxidizer connected in series with the first ozone abatement chamber and the second ozone abatement chamber such that the exhaust air exiting the second ozone abatement chamber directly enters the regenerative thermal oxidizer. ### Claim 13 An apparatus comprising: an ozone abatement chamber comprising a central chamber through which exhaust air passes and one or more UV lamps housed in one or more doors, inner surfaces of both the central chamber and the one or more doors are coated with a reflective material, the one or more doors are situated exterior to the central chamber and outside the flow of the exhaust air through the central chamber, the central chamber comprising a first series of laminar flow plates to ensure laminar flow through the central chamber, wherein at least the first series of laminar flow plates are coated with the reflective material; an inlet connected to the ozone abatement chamber and adapted to accept the exhaust air from an exhaust duct; a second series of laminar flow plates positioned between the inlet and the ozone abatement chamber to further ensure laminar flow of the exhaust air as it enters the ozone abatement chamber, wherein the first series of laminar flow plates and the second series of laminar flow plates are positioned perpendicular to a flow direction of the exhaust air; and a regenerative thermal oxidizer connected in series with the ozone abatement chamber such that the exhaust air exiting the ozone abatement chamber directly enters the regenerative thermal oxidizer; and an air port connected to the exhaust duct for adding bleed air to dilute the exhaust air. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein the first series of laminar flow plates and the second series of laminar flow plates are at least 0.625 inches thick and are perforated with a plurality of equidistant holes. ### Claim 15 (depends on 13) The apparatus of claim 13, wherein the one or more UV lamps produce at least 400 watts of UV light. ### Claim 16 (depends on 13) The apparatus of claim 13, wherein the reflective material is polytetrafluoroethylene. ### Claim 17 (depends on 13) The apparatus of claim 13, further comprising: a plurality of dampers to direct the flow of the exhaust air through, only the first ozone abatement chamber and not the second ozone abatement chamber, through only the second ozone abatement chamber and not the first ozone abatement chamber, or through both the first ozone abatement chamber and the second ozone abatement chamber.