Thermal chamber exhaust structure and method

A thermal chamber system comprising:

• a thermal chamber configured to contain a gas;
• a hot plate positioned in the thermal chamber;
• and
• an exhaust structure comprising:
• an intake section comprising a first high thermal conductivity material, the intake section including an inlet mechanically coupled with the thermal chamber;
• an output section comprising a second high thermal conductivity material, the output section including an outlet;
• and
• a piping section comprising a third high thermal conductivity material, the piping section being configured to communicatively couple the intake section with the output section,
• wherein the exhaust structure is configured to provide a high thermal conductivity path from the hot plate to the outlet, the high thermal conductivity path comprising:
• a low thermal resistance path between the hot plate and the inlet, the low thermal resistance path comprising a portion of a volume of the gas contained in the thermal chamber;
• and
• the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material.

A method of exhausting a vapor, the method comprising:

• generating the vapor by using a hot plate to heat a substrate comprising a bottom anti-reflective coating (BARC);
• heating an inlet of an exhaust structure;
• conducting heat from the inlet to an outlet of the exhaust structure using a first material having a high thermal conductivity;
• transporting the vapor from the inlet to the outlet;
• and
• expelling the vapor through the outlet.