Production apparatus and production method for fine particles

A production apparatus for fine particles including

• a vacuum chamber,
• a material feeding device connected to the vacuum chamber and configured to feed material particles from a material feeding port into the vacuum chamber,
• electrodes arranged in the vacuum chamber for generating plasma in a plasma generation region in the vacuum chamber to produce the fine particles from the material supplied from the material feeding device, and
• a collection device connected to the vacuum chamber and configured to collect the fine particles discharged from the vacuum chamber,
• the apparatus comprising:
• an inner chamber installed between a wall of the vacuum chamber and the plasma generation region, the inner chamber forming an outside space with respect to the wall of the vacuum chamber;
• and
• gas supply pipes for supplying a gas to the outside space between the wall of the vacuum chamber and a wall of the inner chamber.