Baw filter structure with internal electrostatic shielding
AssigneeQorvo US, Inc.
InventorYazid Yusuf
Life of this patent
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AssigneeQorvo US, Inc.
InventorYazid Yusuf
Estimating the term…
Embodiments of the disclosure are directed to a Bulk Acoustic Wave (BAW) filter structure with internal electrostatic shielding. In exemplary aspects disclosed herein, a shielded BAW filter structure includes a substrate, a plurality of transducers over the substrate, and a planar electrostatic shield between the substrate and a top electrode of the plurality of transducers. Each of the plurality of transducers forms a portion of a BAW resonator and resides in a filter including a parasitic capacitance. The planar electrostatic shield is coupled to a ground node and interrupts an electrical field associated with the parasitic capacitance of the filter to reduce the parasitic capacitance. Accordingly, the shielded BAW filter structure reduces the influence of parasitic capacitance providing improved filtering performance compared to an unshielded BAW filter structure.
A bulk acoustic wave (BAW) filter structure with internal shielding, comprising:
A bulk acoustic wave (BAW) filter assembly, comprising:
Dependencies are inferred from the claim text.