Semiconductor wire bonding machine cleaning device and method
AssigneeInternational Test Solutions, Inc.
InventorsAlan E. Humphrey, Wayne C. Smith, Janakraj Shivlal, Bret A. Humphrey
Life of this patent
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Abstract
A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics.
Claims23
A method for cleaning a capillary tube configured to be used in a wire bonding machine, comprising:
- positioning a capillary tube of a wire bonding machine near an elastomeric cleaning material, the capillary tube having an open end with an outer wall and an inner wall that form the open end;
- and
- penetrating the elastomeric cleaning material by the open end of the capillary tube to remove debris from the outer wall and inner wall of the capillary tube.
A method for cleaning a capillary tube configured to be used in a wire bonding machine, comprising:
- positioning an open end of a capillary tube of a wire bonding machine near a cleaning material having a cross linked polymer layer;
- and
- vertically moving the cleaning material into contact with the open end of the capillary tube so that the open end of the capillary tube penetrates the cleaning material to remove debris from the open end of the capillary tube.
A method for cleaning a capillary tube configured to be used in a wire bonding machine, comprising:
- positioning a capillary tube of a wire bonding machine near a cleaning material having a cross linked polymer layer and one or more intermediate layers having predetermined characteristics underneath the cross linked polymer layer, the capillary tube having an open end with an outer wall and an inner wall that form the open end;
- and
- penetrating the cross linked polymer layer of the cleaning material by the open an end of the capillary tube to remove debris from the outer wall and inner wall of the capillary tube.
Dependencies are inferred from the claim text.