Ion milling system
AssigneeHitachi High-Technologies Corporation
InventorsKengo Asai, Toru Iwaya, Hisayuki Takasu, Hiroyasu Shichi
Life of this patent
Estimating the term…
Abstract
To provide an ion milling system that can suppress an orbital shift of an observation electron beam emitted from an electron microscope column, the ion milling system includes: a Penning discharge type ion gun 100 that includes a permanent magnet 114 and that generates ions for processing a sample; and a scanning electron microscope for observing the sample, in which a magnetic shield 172 for reducing a leakage magnetic field from the permanent magnet 114 to the electron microscope column is provided.
Claims14
An ion milling system comprising:
- an ion gun that includes a permanent magnet and that generates ions for processing a sample;
- and
- a scanning electron microscope that observes the sample, wherein
- the ion milling system includes a magnetic shield that reduces a leakage magnetic field from the permanent magnet,
- the ion gun includes an accelerating electrode that accelerates the ions, and
- the magnetic shield is the accelerating electrode configured with a ferromagnetic material.
An ion milling system comprising:
- an ion gun that includes a permanent magnet and that generates ions for processing a sample;
- and
- a scanning electron microscope that observes the sample, wherein
- the ion milling system includes a magnetic shield that reduces a leakage magnetic field from the permanent magnet,
- the ion gun includes an accelerating electrode that accelerates the ions;
- and
- an ion gun base that holds the permanent magnet and the accelerating electrode, and
- the magnetic shield is configured with a ferromagnetic material disposed on a surface, on a side of which the accelerating electrode is disposed, of the ion gun base, and a ferromagnetic material with which the accelerating electrode is covered and which is disposed apart from the accelerating electrode.
An ion milling system comprising:
- an ion gun that includes a permanent magnet and that generates ions for processing a sample;
- and
- a scanning electron microscope that observes the sample, wherein
- the ion milling system includes a magnetic shield that reduces a leakage magnetic field from the permanent magnet,
- the ion gun includes a cathode ring that is disposed on an outer peripheral surface of the permanent magnet, and
- the magnetic shield is the cathode ring configured with a ferromagnetic material.
An ion milling system comprising:
- an ion gun that includes a permanent magnet and that generates ions for processing a sample;
- and
- a scanning electron microscope that observes the sample, wherein
- the ion milling system includes a magnetic shield that reduces a leakage magnetic field from the permanent magnet,
- the magnetic shield is configured with a ferromagnetic material that surrounds an outer periphery of the permanent magnet and that is disposed apart from the permanent magnet, and
- the magnetic shield is on an inner side of an accelerating electrode.
An ion milling system comprising:
- an ion gun that includes a permanent magnet and that generates ions for processing a sample;
- and
- a scanning electron microscope that observes the sample, wherein
- the ion milling system includes a magnetic shield that reduces a leakage magnetic field from the permanent magnet, and
- the magnetic shield configures a magnetic field control board that controls an axial magnetic field within the ion gun by changing a structure of the magnetic shield.
An ion milling system comprising an ion gun that includes a permanent magnet and that generates ions for processing a sample, wherein
- a magnetic field control board is disposed in such a manner that magnetic field control board surrounds an outer periphery of the permanent magnet, is formed from a ferromagnetic material, and controls an axial magnetic field intensity within the ion gun.
Dependencies are inferred from the claim text.