Method for manufacturing nanometric objects using the rupture of a layer deformed by wrinkles

A method for manufacturing a nanoscale object from a structure including a strained elastic layer on a foundation in a solid state present at a surface of a rigid substrate, the method comprising:

• melting the foundation to bring the foundation to a liquid state for a duration higher than or equal to 50 ns, thickness of the foundation being at least 20 nm and lower than a predetermined thickness corresponding to a theoretical peak-to-peak amplitude of wrinkles, the melting resulting in a stress relaxation of the elastic layer which generates a simultaneous deformation, by formation of wrinkles, of the elastic layer and of the foundation, the formation of the wrinkles being accompanied by a localized contact between the elastic layer and the rigid substrate separating regions of the foundation;
• solidifying the foundation to bring the foundation back to a solid state, the solidification forming a solid structure having wrinkles at the surface;
• the melting and solidification being reiterated to increase an interval between separated regions of the foundation until the elastic layer ruptures to produce the nanoscale object.