Plasma generation device

A method for generating plasma using a plasma generation device, comprising:

• responsive to a first plasma generation module of a plurality of plasma generation modules being attached to a first part of the plasma generation device:
• supplying a first voltage associated with a first frequency to a first electrode of the first plasma generation module;
• and
• conducting process gas from a tank to the first plasma generation module in order to generate a first type of plasma at the first plasma generation module;
• and
• responsive to a second plasma generation module of the plurality of plasma generation modules being attached to the first part of the plasma generation device, supplying a second voltage associated with a second frequency to a second electrode of the second plasma generation module in order to generate a second type of plasma at the second plasma generation module.

A plasma generation device, comprising:

• a controller configured to regulate electricity supplied to a terminal of the plasma generation device;
• and
• a plurality of sets of terminals, wherein each set of terminals of the plurality of sets of terminals corresponds to a plasma generation module of a plurality of plasma generation modules, wherein:
• the plurality of sets of terminals comprises a first set of terminals corresponding to a first plasma generation module;
• the first plasma generation module comprises a first conductor positioned such that the first plasma generation module being attached to a first part of the plasma generation device causes a first connection between the first set of terminals;
• responsive to the first connection, the controller is used to supply a first voltage associated with a first frequency to a first electrode, of the first plasma generation module, connected to the terminal;
• the plurality of sets of terminals comprises a second set of terminals corresponding to a second plasma generation module;
• the second plasma generation module comprises a second conductor positioned such that the second plasma generation module being attached to the first part of the plasma generation device causes a second connection between the second set of terminals;
• and
• responsive to the second connection, the controller is used to supply a second voltage associated with a second frequency to a second electrode, of the second plasma generation module, connected to the terminal.