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US 10,352,960 B1Granted
Free mass MEMS accelerometer
AssigneeGarmin International, Inc.
InventorsKirill V. Shcheglov, Yingxiang Cheng, Nolan F. Maggipinto
Life of this patent
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Abstract
A MEMS accelerometer incorporating a metrology element to directly measure minute changes in measurement baseline. In particular, the MEMS accelerometer incorporates a metrology bar (MB). Embodiments also relate to stress isolation into the sensor design to isolate the sensitive areas of the chip (i.e., the metrology baseline and the proof mass mounting points) from outside stress.
Claims24
An accelerometer comprising:
- a die package;
- a planar resonator positioned within the package;
- a plurality of slots within the resonator;
- a metrology bar having a fixed location on the resonator, the metrology bar having at least one portion thereof positioned within at least one of the plurality of slots of the resonator;
- a proof mass having a nominal position and configured to move from the nominal position upon excitation;
- and
- at least one excitation electrode positioned proximate to the at least one portion of the metrology bar within the at least one of the plurality of slots of the resonator, the at least one excitation electrode configured to output a force causing movement of the proof mass to its nominal position;
- wherein the force output by the at least one excitation electrode to move the proof mass to its nominal position corresponds to an acceleration of the die package.
5 more elements
An accelerometer comprising:
- a die package;
- a planar resonator positioned within the die package;
- a metrology bar having a central mounting point within the planar resonator;
- a proof mass having a nominal position and configured to move from the nominal position upon excitation;
- a plurality of slot openings in the proof mass, the plurality of slot openings arranged symmetrically in the proof mass;
- an excitation electrode positioned in at least one of the plurality of slot openings, the excitation electrode configured to output a force causing movement of the proof mass to its nominal position;
- and
- a sensing electrode positioned in at least one of the plurality of slot openings;
- wherein the force output by the at least one excitation electrode to move the proof mass to its nominal position corresponds to an acceleration of the die package;
- and
- wherein at least one portion of the metrology bar is positioned in at least one of the plurality of slot openings in which the excitation electrode and the sensing electrode are positioned.
8 more elements
Dependencies are inferred from the claim text.