Alkoxide compound, raw material for forming thin film, method for manufacturing thin film, and alcohol compound
AssigneeAdeka Corporation
InventorsAtsushi Sakurai, Masako Hatase, Tomoharu Yoshino, Masaki Enzu
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Abstract
An alkoxide compound is represented by General Formula (I) below: wherein R1 to R3 each independently represent hydrogen, a C1-12 hydrocarbon group, etc.; R4 represents a C1-12 hydrocarbon group, etc.; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C1-12 hydrocarbon group, etc.; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n+m represents the valence of the metal atom or silicon atom.
Claims3
An alkoxide compound of the Formula No. 43 or the Formula No. 49 below:
- wherein in the Formula No. 43 and the Formula No. 49, Et represents ethyl and Me represents methyl.
Dependencies are inferred from the claim text.