Semiconductor memory device with efficient inclusion of control circuits

A semiconductor memory device, comprising:

• a plurality of memory cell arrays that include a plurality of memory cells between a plurality of first wirings extending in a first direction and a plurality of second wirings extending in a second direction intersecting the first direction;
• a first control circuit including a plurality of control transistors of a first conductivity type disposed in a first region directly below the plurality of memory cell arrays and one of the control transistors electrically connected to a first wiring of the plurality of first wirings and configured to supply a voltage to the first wiring;
• and
• a second control circuit including a first transistor of a first conductivity type connected in parallel to a second transistor of a second conductivity type, an end of the first and second transistors being connected to an end of at least one control transistor in the plurality, the second control circuit being configured to deliver a voltage to the plurality of control transistors for application to the first wirings, wherein
• the first transistor is disposed in the first region,
• the second transistor is disposed in a second region adjacent to the first region, the second region being below a gap between adjacent memory cell arrays in the plurality of memory cell arrays,
• each first wiring is connected to the one control transistor in the first control circuit on a first end of the control transistor,
• a second end of the control transistor is connected to first ends of the first and second transistors via a first metal layer disposed at a level below the plurality of memory cell arrays, and
• second ends of the first and second transistors are connected to each other via a second metal layer disposed at a level above the first metal layer.

A semiconductor memory device, comprising:

• a first memory cell array on a semiconductor substrate;
• a second memory cell array on the semiconductor substrate adjacent to the first memory cell array;
• a first control circuit on the substrate in a first region directly below the first memory cell array, the first control circuit including a control transistor having a first end connected to a word line of the first memory cell array;
• a second control circuit comprising a complementary transistor pair including a first transistor of a first conductivity type and a second transistor of a second conductivity type connected in parallel, a first end of the complementary pair being connected to a second end of the control transistor, the first transistor being disposed in the first region, the second transistor being disposed in a second region of the substrate, the second region being below a gap between the first and second memory cell arrays;
• and
• a vertical contact disposed in the gap, the vertical contact being electrically connected to the second control circuit.

A semiconductor memory device, comprising:

• a first memory cell array on a semiconductor substrate;
• a second memory cell array on the semiconductor substrate adjacent to the first memory cell array;
• a first control circuit on the substrate in a first region directly below the first memory cell array, the first control circuit including a control transistor having a first end connected to a word line of the first memory cell array;
• a second control circuit comprising a complementary transistor pair including a first transistor of a first conductivity type and a second transistor of a second conductivity type connected in parallel, a first end of the complementary pair being connected to a second end of the control transistor, the first transistor being disposed in the first region, the second transistor being disposed in a second region of the substrate, the second region being below a gap between the first and second memory cell arrays;
• a first wiring level between the substrate and the first and second memory cell arrays, a wiring on the first wiring level connecting the second end of the control transistor and the first end of the complementary pair;
• and
• a second wiring level between the first wiring level and the first and second memory cell arrays, a wiring on the second wiring level connecting ends of the first and second transistors to form a second end of the complementary pair.