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US 10,343,920 B2Granted
Aligned carbon nanotubes
AssigneeASM IP Holding B.V.
InventorSuvi Haukka
Life of this patent
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Abstract
Methods of forming carbon nanotubes and structures and devices including carbon nanotubes are disclosed. Methods of forming the carbon nanotubes include patterning a surface of a substrate with polymeric material, removing portions of the polymeric material to form exposed substrate surface sections, and forming the carbon nanotubes on the exposed substrate sections.
Claims16
A method of forming carbon nanotubes on a surface of a substrate, the method comprising the steps of:
- providing a substrate in a reaction space, wherein the substrate comprises a surface and the surface comprises patterned polymeric material thereon and exposed substrate surface sections;
- using chemical vapor deposition, selectively form catalyst material only on the exposed substrate surface sections;
- and
- forming carbon nanotubes using the catalyst material.
1 more element
A method of forming carbon nanotubes on a surface of a substrate, the method comprising the steps of:
- providing a substrate having a surface;
- disposing a polymeric material onto the surface;
- annealing the polymeric material to form aligned phases of the polymeric material;
- removing portions of the polymeric material to form exposed substrate sections corresponding to the aligned phases;
- using chemical vapor deposition, selectively form catalyst material only on the exposed substrate sections;
- and
- forming carbon nanotubes using the catalyst material.
4 more elements
Dependencies are inferred from the claim text.