Grinding apparatus
AssigneeDisco Corporation
InventorHiroki Miyamoto
Life of this patent
Estimating the term…
Abstract
A grinding apparatus includes a holding unit including a holding table having a holder for holding a workpiece and a grinding water suction part for drawing in grinding water outside of the holder, a rotational shaft having an end fixed centrally to a bottom surface of the holding table, a tubular rotary joint surrounding the rotational shaft, and a motor rotating the rotational shaft about its own axis. The rotational shaft has a first suction channel held in fluid communication with the holder of the holding table and a second suction channel held in fluid communication with the grinding water suction part. The rotary joint has a communication channel by which the first suction channel and the second suction channel are held in fluid communication with at least a suction source.
Claims7
A grinding apparatus comprising:
- holding means for holding a workpiece;
- and
- grinding means for grinding the workpiece held by said holding means with a grinding stone while supplying grinding water to the workpiece,
- wherein said holding means includes
- a holding table having a holder for holding the workpiece under suction and a grinding water suction part spaced from said holder and configured for drawing in grinding water outside of said holder,
- a rotational shaft having an end fixed centrally to a bottom surface of said holding table,
- a tubular rotary joint surrounding said rotational shaft, and
- rotating means for rotating said rotational shaft about its own axis,
- said rotational shaft has a first suction channel held in fluid communication with said holder of said holding table and a second suction channel held in fluid communication with said grinding water suction part,
- said tubular rotary joint has a communication channel by which said first suction channel and said second suction channel are held in fluid communication with at least a suction source, and
- grinding water flowing into said second suction channel is present between said rotational shaft and said rotary joint.
Dependencies are inferred from the claim text.