Microchannel plate and electron multiplier
AssigneeHamamatsu Photonics K.K.
InventorsTakaaki Nagata, Yasumasa Hamana, Hajime Nishimura, Kimitsugu Nakamura
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Abstract
A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of Al2O3. The second film is made of SiO2. The first film is thicker than the second film.
Claims20
A microchannel plate comprising:
- a substrate including a front surface, a rear surface, and a side surface;
- a plurality of channels penetrating from the front surface to the rear surface of the substrate;
- a first film provided on at least an inner wall surface of the channel;
- a second film provided on the first film;
- and
- electrode layers provided on the front surface and the rear surface of the substrate,
- wherein the first film is made of Al2O3,
- the second film is made of SiO2, and
- the first film is thicker than the second film.
An electron multiplier comprising:
- a main body including a front surface, a rear surface, and a side surface;
- a channel penetrating from the front surface to the rear surface of the main body;
- a first film provided on at least an inner wall surface of the channel;
- a second film provided on the first film;
- and
- electrode layers provided on the front surface and the rear surface of the main body,
- wherein the first film is made of Al2O3,
- the second film is made of SiO2, and
- the first film is thicker than the second film.
Dependencies are inferred from the claim text.