Diffusion pump to supply heat from a condenser to a heating element
AssigneeLeybold Aktiengesellschaft
InventorHans-Werner Schweizer
Life of this patent
Estimating the term…
Abstract
A diffusion pump is provided that includes a housing and a boiling chamber connected to the housing. The boiling chamber has a heating element. The housing has a nozzle that is connected to the boiling chamber. The housing also has a condenser is arranged at an internal surface, where the condenser has a cooling system. The boiling chamber is thermally isolated from the condenser by an isolator. The cooling system is at least partially a water cooling system and is connected to the heating element via a heat pump such that heat from the condenser is supplied to the heating element.
Claims15
A diffusion pump, comprising
- a housing,
- a boiling chamber connected to said housing,
- a heating element arranged in said boiling chamber,
- a nozzle arranged in said housing and connected to said boiling chamber,
- a condenser arranged in said housing in an area of said nozzle, and
- a cooling system configured for cooling said condenser and arranged in an area of said condenser,
- wherein
- said cooling system of said condenser is connected to said heating element via a heat pump such that heat from said condenser is supplied to said heating element.
A method for controlling a diffusion pump, comprising:
- a housing,
- a boiling chamber connected to said housing,
- a heating element arranged in said boiling chamber,
- a nozzle arranged in said housing and connected to said boiling chamber,
- a condenser arranged in said housing in an area of said nozzle, and
- a cooling system configured for cooling said condenser and arranged in an area of said condenser,
- wherein the condenser temperature is measured and said cooling system of said condenser is controlled by a regulator depending on the condenser temperature, and
- wherein
- said cooling system of said condenser is connected to said heating element via a heat pump such that heat from said condenser is supplied to said heating element.
Dependencies are inferred from the claim text.