Imprint apparatus and article manufacturing method

A method of manufacturing an article, the method comprising steps of:

• performing patterning on a substrate with a resin by an imprint apparatus;
• and
• processing the patterned substrate,
• wherein the imprint apparatus comprises:
• a substrate holding unit for holding the substrate,
• wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction,
• the plurality of holding areas has a different width dimension in the predetermined direction respectively based on positions in the predetermined direction, and
• a surface area ratio of a surface area of a widest area of the plurality of holding areas and a surface area of a narrowest area of the plurality of holding areas is within a range of 0.8 to 1.2.