Back to results
US 10,332,729 B2Granted
Compression member for use in showerhead electrode assembly
AssigneeLam Research Corporation
InventorsDarrell Ehrlich, Daniel Arthur Brown, Ian Kenworthy
Life of this patent
Estimating the term…
Abstract
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.
Claims18
A thermal control plate of a showerhead electrode assembly, comprising:
- a film heater;
- a plurality of power supply boots, wherein each power supply boot electrically contacts a respective film heater section;
- and
- a plurality of compression members, wherein each compression member is adjacent a respective one of the power supply boots and contacts a portion of a respective film heater section.
1 more element
Dependencies are inferred from the claim text.