Terahertz-wave generating element terahertz-wave detecting element and terahertz time-domain spectroscopy device
AssigneeCanon Kabushiki Kaisha
InventorToshihiko Ouchi
Life of this patent
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Abstract
A terahertz-wave generating element includes a waveguide including an electro-optic crystal; an optical coupling member that extracts a terahertz wave, which is generated from the electro-optic crystal as a result of light propagating through the waveguide, to a space; and at least two electrodes that cause a first-order electro-optic effect in the electro-optic crystal by applying an electric field to the waveguide so as to change a propagation state of the light propagating through the waveguide. A crystal axis of the electro-optic crystal of the waveguide is set such that the terahertz wave generated by a second-order nonlinear optical process and the light propagating through the waveguide are phase-matched.
Claims41
A terahertz-wave generating element, comprising:
- a substrate;
- a waveguide arranged on the substrate and configured to propagate light in a first direction;
- and
- an optical coupling member arranged on the waveguide and guiding a terahertz wave, which is generated due to light propagating through the waveguide, from the waveguide to a space,
- wherein the waveguide is formed of a material selected from a group consisting of LiNbOx, LiTaOx, NbTaOx, KTP, DAST, ZnTe, GaSe, GaP, and CdTe, and
- wherein in a third direction perpendicular to the first direction and perpendicular to a second direction perpendicular to an in-plane direction of the substrate, a width of the waveguide is smaller than a width of the optical coupling member.
A terahertz-wave generating element comprising:
- a substrate;
- a waveguide arranged on the substrate and configured to propagate light in a first direction;
- and
- a member arranged on the waveguide,
- wherein a length of the member in a second direction perpendicular to an in-plane direction of the substrate gradually becomes shorter in the first direction, and
- wherein, in a third direction perpendicular to the first direction and perpendicular to the second direction, a width of the member is larger than a width of the waveguide.
A terahertz-wave generating element comprising:
- a substrate;
- a waveguide arranged on the substrate and configured to propagate light in a first direction;
- a member arranged on the waveguide;
- and
- an optical fiber configured to guide light to the waveguide,
- wherein the member is formed of silicon,
- wherein a length of the member in a second direction perpendicular to an in-plane direction of the substrate gradually becomes shorter in a first direction, and
- wherein, in a third direction perpendicular to the first direction and perpendicular to the second direction, a width of the member is larger than a width of the waveguide.
Dependencies are inferred from the claim text.