Flow rate sensor correction device, program for correction device, and correction method

An apparatus comprising:

• a processor, and memory storing instructions that, when executed by the processor, cause the apparatus to:
• output an output signal corresponding to a flow rate of fluid flowing through a flow path;
• calculate a sensor output value x on a basis of a value indicated by the output signal and a sensitivity coefficient;
• store a flow rate characteristic function with the sensor output value x as an input and a flow rate value y as an output;
• calculate a flow rate value y on a basis of the sensor output value x and the flow rate characteristic function;
• set the sensitivity coefficient on a basis of an initial value and a sensitivity correction value m and adjust a sensitivity of a flow rate sensor by changing the sensitivity coefficient of the flow rate sensor;
• calculate a corrected flow rate characteristic function g(x) on a basis of a function correction value n and a standard flow rate characteristic function f(x), the function correction value being determined on a basis of the flow rate value y outputted from the flow rate sensor;
• and
• store, as the flow rate characteristic function, a final flow rate characteristic function h(x) based on the corrected flow rate characteristic function g(x).

A correction method that corrects a flow rate characteristic function of a flow rate sensor comprising:

• a sensor mechanism adapted to output an output signal corresponding to a flow rate of fluid flowing through a flow path;
• a sensor output calculation part adapted to calculate a sensor output value x on a basis of a value indicated by the output signal and a sensitivity coefficient;
• a function storage part adapted to store the flow rate characteristic function with the sensor output value x as an input and a flow rate value y as an output;
• and a flow rate calculation part adapted to calculate a flow rate value y on a basis of the sensor output value x calculated by the sensor output calculation part and the flow rate characteristic function, the correction method comprising steps of:
• setting the sensitivity coefficient on a basis of an initial value and a sensitivity correction value m and adjusting a sensitivity of the flow rate sensor by changing the sensitivity coefficient of the flow rate sensor;
• calculating a corrected flow rate characteristic function g(x) on a basis of a function correction value n and a standard flow rate characteristic function f(x), the function correction value n being determined on a basis of the flow rate value y outputted from the flow rate sensor;
• and
• making the function storage part store, as the flow rate characteristic function, a final flow rate characteristic function h(x) based on the calculated corrected flow rate characteristic function g(x).